“…The most notable types of deterministically patterned SERS substrates include (i) dense periodic arrays and gratings, [35,46,61] (ii) plasmonic structures with extremely small (5 nm or less) nanogaps [48,52,64,65], and (iii) multiscale structures and structures with complex 3D architectures [18,51,57,58,66]. Silver-coated gratings [61] and dense periodic arrays of nanoscale pillars [45,46] were among historically first SERS substrates created by means of EBL.…”