Multifunctional Rhinomanometer with Integrated Highly Sensitive Flexible Piezoelectric-Beam-Array Flow and Fast Dynamic Response Humidity Sensors

Barium titanate piezoelectric-film-based beam-array airflow sensor for wearable breath-monitoring application

“…However, flexible orifice plates with the integration of piezoelectric thinfilm-based smart materials have rarely been investigated. With advanced microfabrication technology, we recently reported the use of a smart flexible orifice plate in an airflow sensor and demonstrated the feasibility of using it to sense human breath [28,29]. In this study, we further characterize the relationship between the flow rate and pressure difference, and the flow rate and charge generation of the piezoelectric film.…”

“…Tiwari and Chandra reported that the RF magnetron sputtered amorphous silicon thin film transformed into the piezoresistive polycrystalline phase by the aluminum induced crystallization process at a much lower annealing temperature of about 400 • C. This technology possesses many advantages such as pressure sensor applications [27]. In contrast to hot-wire/hot-film or differential pressure flow sensors that require electrical power for device operation, we developed a breathing sensor with a piezoelectric flexible composite membrane for wearable applications [28,29]. An analytical analysis of the developed sensor was performed in this study.…”