Herein, we report on the design, preparation, and electrical properties of organic/inorganic hybrid bilayer dielectric films via facile solution-based fabrication at room temperature for the low-voltage operation of organic field-effect transistors (OFETs). The hybrid bilayer dielectric films are easily fabricated by a twostep process involving ultraviolet curing of a sol-gel zirconium oxide and deposition of hydrophobic self-assembled monolayers. These novel dielectrics exhibit great insulating properties (leakage current densities <10 −6 A/cm 2 at 2 V), high capacitances (500 nF/cm 2 ), and ultra-smooth surfaces (root-meansquare roughness <0.2 nm). Consequently, the hybrid dielectrics integrated into pentacene OFETs function at relatively low voltages (less than −2.5 V) with great FET characteristics (mobility: 0.4 cm 2 /V s, low subthreshold swing: down to 0.2 V/dec, on/off current ratio: 10 5 ).