Multifractal characteristics of titanium nitride thin films

Abstract

The study presents a multi-scale microstructural characterization of three-dimensional (3-D) micro-textured surface of titanium nitride (TiN) thin films prepared by reactive DC magnetron sputtering in correlation with substrate temperature variation. Topographical characterization of the surfaces, obtained by atomic force microscopy (AFM) analysis, was realized by an innovative multifractal method which may be applied for AFM data. The surface micromorphology demonstrates that the multifractal geometry of TiN thin films can be characterized at nanometer scale by the generalized dimensions D q and the singularity spectrum f(α). Furthermore, to improve the 3-D surface characterization according with ISO 25178-2:2012, the most relevant 3-D surface roughness parameters were calculated. To quantify the 3-D nanostructure surface of TiN thin films a multifractal approach was developed and validated, which can be used for the characterization of topographical changes due to the substrate temperature variation.

Multifractal analysis of human canine teeth at nano scale: atomic force microscopy studies

“…However, when fractal analysis cannot describe surface topography due to its complexity, multifractal analysis is the most appropriate tool for characterization of surface morphology [30][31][32][33][34].…”

“…By considering q as the order moment with real values from − ∞ (less dense areas) to + ∞ (dense areas), D q and α(q) represent information about fractal/multifractal geometry and are measured as the generalized dimension of Hölder exponents of q while f(α) refer to singularity spectrum. Two multifractal parameters are related by the Legendre transformation [32][33][34].…”

Equipment and Technology for Combined Ion–Plasma Strengthening of Cutting Tools

“…In all cases, the coating is bombarded during the synthesis by ions accelerated from the gas discharge plasma [23][24][25][26] or using broad beam sources of ions or fast gas atoms [27][28][29]. The bombardment improves adhesion and other properties of the coatings [30][31][32][33][34]. For example, when negative 45-kV pulses with 50 µs width and 50 Hz repetition rate are applied to a substrate made of high speed steel (HSS) instead of bias voltage~80 V, the sputtered titanium nitride coating exhibits improved adhesion and nanostructure, a change of yellow color to brown, an increase in microhardness from 2500 HV to 5000 HV, and a decrease in internal stress [35][36][37].…”

Study on Controlling the Distribution of Bioactivity Apatite Polycrystalline on Titanium Surface

“…Such as Bioglass coating, calcium phosphate coating, TiO 2 -HA composite coating, titanium dioxide coating, silica coating [3].Though the bonding strength between the coating and the new bone was higher after implantation for a period of time, there are still disadvantages for surface coating, due to the surface coating of the implant was often under a dynamic, impact and high shear stress environment, it was easy to fall off from the metal, eventually leading to implant failure [4,5].…”