Multicomponent vapor deposition polymerization of poly(methyl methacrylate) in an axisymmetric vacuum reactor

Chen, Xichong; Anthamatten, Mitchell

doi:10.1016/j.polymer.2008.02.027

Cited by 18 publications

(21 citation statements)

References 32 publications

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“…Micrometer‐thick, high‐performance poly(benzoxazole) (PBO) coatings have also been vapor deposited 251. Uniform, 3 µm thick poly(methyl methacrylate) (PMMA) films have been synthesized using iCVD; less than 2% deviation in thickness was noted across the samples 252…”

Section: Characteristics Of Cvd Polymersmentioning

confidence: 99%

“…Comparison of the interferometry results with data collected using an independent method yields a calibration that can be used to continuously monitor film growth. Utilization of optically transparent casings for iCVD reactors enables real‐time determination of film thickness, allowing the user to terminate the deposition once the desired result has been achieved 5, 188, 252, 253. Single and multiple wavelength interferometry have also been used for in situ probing of the thermal properties of polymeric thin films 254, 255…”

Section: Characteristics Of Cvd Polymersmentioning

confidence: 99%

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Chemical Vapor Deposition of Conformal, Functional, and Responsive Polymer Films

et al. 2010

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Chemical vapor deposition (CVD) polymerization utilizes the delivery of vapor-phase monomers to form chemically well-defined polymeric films directly on the surface of a substrate. CVD polymers are desirable as conformal surface modification layers exhibiting strong retention of organic functional groups, and, in some cases, are responsive to external stimuli. Traditional wet-chemical chain- and step-growth mechanisms guide the development of new heterogeneous CVD polymerization techniques. Commonality with inorganic CVD methods facilitates the fabrication of hybrid devices. CVD polymers bridge microfabrication technology with chemical, biological, and nanoparticle systems and assembly. Robust interfaces can be achieved through covalent grafting enabling high-resolution (60 nm) patterning, even on flexible substrates. Utilizing only low-energy input to drive selective chemistry, modest vacuum, and room-temperature substrates, CVD polymerization is compatible with thermally sensitive substrates, such as paper, textiles, and plastics. CVD methods are particularly valuable for insoluble and infusible films, including fluoropolymers, electrically conductive polymers, and controllably crosslinked networks and for the potential to reduce environmental, health, and safety impacts associated with solvents. Quantitative models aid the development of large-area and roll-to-roll CVD polymer reactors. Relevant background, fundamental principles, and selected applications are reviewed.

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Section: Characteristics Of Cvd Polymersmentioning

confidence: 99%

Section: Characteristics Of Cvd Polymersmentioning

confidence: 99%

Chemical Vapor Deposition of Conformal, Functional, and Responsive Polymer Films

et al. 2010

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“…Chemical vapor deposition. Developed fairly recently [6,7,8]. Monomer and initiator vapors are introduced to an oxygen-free reaction chamber with the substrate.…”

Section: Coating Methodsmentioning

confidence: 99%

Acrylic purification and coatings

Kuźniak¹

2011

AIP Conference Proceedings

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Abstract. Radon (Rn) and its decay daughters are a well-known source of background in direct WIMP detection experiments, as either a Rn decay daughter or an alpha particle emitted from a thin inner surface layer of a detector could produce a WIMP-like signal. Different surface treatment and cleaning techniques have been employed in the past to remove this type of contamination. A new method of dealing with the problem has been proposed and used for a prototype acrylic DEAP-1 detector. Inner surfaces of the detector were coated with a layer of ultra pure acrylic, meant to shield the active volume from alphas and recoiling nuclei. An acrylic purification technique and two coating techniques are described: a solvent-borne (tested on DEAP-1) and solvent-less (being developed for the full scale DEAP-3600 detector).

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“…Another special type of CVD process for the deposition of polymer thin fi lms is the so called initiated CVD (iCVD) for example for PMMA (Chan and Gleason, 2005;Chen and Anthamatten, 2008) 10.15 Deposition set-up for poly-para-xylylene (Neubert et al ., 2011b). methacrylate) (PGMA) (Spee et al ., 2011) thin fi lms.…”

Section: Non-plasma Activated Chemical Vapor Depositionmentioning

confidence: 99%