Multi-layer topography measurement using a new hybrid single-shot technique: Chromatic Confocal Coherence Tomography (CCCT)

Boettcher, T.; Gronle, Marc

doi:10.1364/oe.25.010204

Cited by 14 publications

(9 citation statements)

References 25 publications

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“…The CCM method is a non-destructive and non-contact optical technique that has been researched for film thickness measurement for transparent and non-transparent films [ 101 , 102 ]. An incident white light source is focused into its spectrum of wavelengths for varying distances to the sample, and in terms of film thickness measurement, two peaks relational to the wavelengths and distance to the sample are calculated, the difference between these peaks would result in the optical thickness of the measured material.…”

Section: Potential In-line Coating Thickness Test Methodsmentioning

confidence: 99%

Continuous In-Line Chromium Coating Thickness Measurement Methodologies: An Investigation of Current and Potential Technology

Jones

Uggalla

et al. 2021

Sensors

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Coatings or films are applied to a substrate for several applications, such as waterproofing, corrosion resistance, adhesion performance, cosmetic effects, and optical coatings. When applying a coating to a substrate, it is vital to monitor the coating thickness during the coating process to achieve a product to the desired specification via real time production control. There are several different coating thickness measurement methods that can be used, either in-line or off-line, which can determine the coating thickness relative to the material of the coating and the substrate. In-line coating thickness measurement methods are often very difficult to design and implement due to the nature of the harsh environmental conditions of typical production processes and the speed at which the process is run. This paper addresses the current and novel coating thickness methodologies for application to chromium coatings on a ferro-magnetic steel substrate with their advantages and limitations regarding in-line measurement. The most common in-line coating thickness measurement method utilized within the steel packaging industry is the X-ray Fluorescence (XRF) method, but these systems can become costly when implemented for a wide packaging product and pose health and safety concerns due to its ionizing radiation. As technology advances, nanometer-scale coatings are becoming more common, and here three methods are highlighted, which have been used extensively in other industries (with several variants in their design) which can potentially measure coatings of nanometer thickness in a production line, precisely, safely, and do so in a non-contact and non-destructive manner. These methods are optical reflectometry, ellipsometry and interferometry.

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Section: Potential In-line Coating Thickness Test Methodsmentioning

confidence: 99%

Continuous In-Line Chromium Coating Thickness Measurement Methodologies: An Investigation of Current and Potential Technology

Jones

Uggalla

et al. 2021

Sensors

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“…In recent years, the approaches to combine distinct measurement principles have been mostly attempted in film metrology to overcome the limitation of each measurement system [ 87 , 88 , 89 , 90 , 91 , 92 , 93 , 94 , 95 , 96 , 97 ]. Ellipsometry and reflectometry have the ability of measuring film thicknesses, but the topographic height of the film specimen cannot be determined.…”

Section: Technology and Analysis In Optical Film Metrologymentioning

confidence: 99%

“…Furthermore, confocal microscopy and SRI were combined for simultaneously measuring the physical thickness and refractive index of film layers [ 96 , 97 ]. Considering the difference between the theoretical descriptions of two techniques, the physical thickness and the refractive index of a film layer were able to be decoupled, and they were separately measured.…”

Section: Technology and Analysis In Optical Film Metrologymentioning

confidence: 99%

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Recent Progress on Optical Tomographic Technology for Measurements and Inspections of Film Structures

Joo

Park

2022

Micromachines

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In this review, we present the recent progress on film metrology focused on the advanced and novel technologies during the last two decades. This review consists of various technologies and their measurement schemes to provide the inspiration for understanding each of the measurement principles and applications. In the technology and analysis section, several optical techniques used in film metrology are introduced and described with their benefits and limitations. The temporal, spatial and snapshot measurement schemes of optical film metrology are introduced in the measurement scheme section, and finally, the prospect on optical film metrology will be provided and discussed with the technology trend.

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“…Previous researchers have investigated lower surface distance measurement methods for transparent plane-parallel plates and lenses based on the chromatic confocal sensor 16 , 17 . Various novel modified models have also been proposed for precision measurements of the lower surface profile of thin transparent components, e.g., frequency-shifted confocal feedback, 18 adaptive modal decomposition, 19 biaxial optical scheme with inclined illumination, 20 and so on 21 , 22 . But these methods are only applicable to plane-parallel plates, and there is still non-negligible error when it comes to curved components.…”

Section: Introductionmentioning

confidence: 99%

Bilateral form characterization of curved transparent components using chromatic confocal sensor

Wu,

Zhao,

Jiang

et al. 2023

Opt. Eng.

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To accurately characterize the geometric form of key components in industrial products, many profile measuring instruments have been developed to date. However, there are some special components, such as the hemispherical resonators featuring thin curved transparent surfaces, which are difficult to be measured using general instruments. The chromatic confocal technology was introduced in this paper to conduct the bilateral form characterization of this type of surfaces. Based on the assumption of tilted plate approximation, a modified ray tracing model was presented to correct the errors produced by the curved surfaces. The experiment of measurement on tilted, fused silica plates was conducted to demonstrate the effectiveness of the proposed model. Results show that the developed model improves the measurement accuracy of plates with large tilt angle. A three-axis motion stage was built with self-developed chromatic confocal sensor to obtain the bilateral profiles of the resonator. By fitting the spheres with the scanning profiles, the form error between the measurement points and the fitted spheres can be calculated. Partial form errors along the circumferential and axial directions of the resonator are evaluated, and an intuitive assessment of its thickness variation along the circumferential direction was made.

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Multi-layer topography measurement using a new hybrid single-shot technique: Chromatic Confocal Coherence Tomography (CCCT)

Cited by 14 publications

References 25 publications

Continuous In-Line Chromium Coating Thickness Measurement Methodologies: An Investigation of Current and Potential Technology

Continuous In-Line Chromium Coating Thickness Measurement Methodologies: An Investigation of Current and Potential Technology

Recent Progress on Optical Tomographic Technology for Measurements and Inspections of Film Structures

Bilateral form characterization of curved transparent components using chromatic confocal sensor

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