Multi-interferometric displacement measurement system with variable measurement mirrors

Abstract

Laser interferometers have been widely implemented for the displacement sensing and positioning calibration of the precision mechanical industry, due to their excellent measuring features and direct traceability to the dimensional definition. Currently some kinds of modified Fabry-Perot interferometers with a planar mirror or a corner cube prism as the measurement mirror have been proposed. Each optical structure of both models has the individual particularity and performance for measuring applications. In this investigation, a multi-interferometric displacement system has been proposed whose measurement mirror can be quickly and conveniently altered with a planar mirror or a corner cube reflector depending on the measuring demand. Some experimental results and analyses about the interpolation error and displacement measurements with both reflectors have been demonstrated. According to the results, suggestions about the choice of a measuring reflector and interpolation model have been presented. With the measuring verifications, the developed system with a maximum standard deviation less than 0.2081 μm in measuring range of 300 mm would be a compact and robust tool for sensing or calibrating the linear displacement of mechanical equipment.

A miniaturized tuneable light source using a piezo-actuated Fabry-Pérot interferometer

“…FPIbased miniature tuneable light sources find applications in diverse fields where compactness, portability, and precise control of light parameters are critical. Examples include laser interferometry [2], micromachined tunable Fabry-Pérot (μFP) filters for infrared spectroscopy [3], high-sensitivity FPI pressure sensor [4] and ultra-compact MEMS Fabry-Pérot interferometer-based sensor for NIR range [5]. *Astghik.Chalyan@vub.be; https://www.b-phot.org/ VTT's miniaturized piezo-actuated or MEMS-based Fabry-Pérot Interferometer (FPI) technology finds application in developing tuneable filters across distinct wavelength ranges, including UV-VIS, SWIR, and thermal IR.…”