Multi-frequency Atomic Force Microscopy based on enhanced internal resonance of an inner-paddled cantilever

Potekin, Randi; Dharmasena, Sajith; Keum, Hohyun; Jiang, Xuesheng; Lee, Ji-Young; Kim, Seok; Bergman, Lawrence A.; Vakakis, Alexander F.; Cho, Han Na

doi:10.1016/j.sna.2018.01.063

Cited by 40 publications

(22 citation statements)

References 42 publications

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“…The fabrication procedure is quite simple but powerful, allowing for this specific inner-paddled AFM probe design. Using this AFM probe design, intentional nonlinear internal resonance was demonstrated for the enhancement of higher harmonics, leading to improved simultaneous topography imaging and compositional mapping [116]. More recently, the efficacy of this AFM probe design was also demonstrated via piezoresponse force microscopy (PFM) [117].…”

Section: Mems Via Micro-legomentioning

confidence: 99%

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Micro-LEGO for MEMS

Kim

2019

Micromachines

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The recently developed transfer printing-based microassembly called micro-LEGO has been exploited to enable microelectromechanical systems (MEMS) applications which are difficult to achieve using conventional microfabrication. Micro-LEGO involves transfer printing and thermal processing of prefabricated micro/nanoscale materials to assemble structures and devices in a 3D manner without requiring any wet or vacuum processes. Therefore, it complements existing microfabrication and other micro-assembly methods. In this paper, the process components of micro-LEGO, including transfer printing with polymer stamps, material preparation and joining, are summarized. Moreover, recent progress of micro-LEGO within MEMS applications are reviewed by investigating several example devices which are partially or fully assembled via micro-LEGO.

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Section: Mems Via Micro-legomentioning

confidence: 99%

“…SEM images of AFM cantilevers with single ( a ) and double ( b ) inner paddles which are formed by micro-LEGO and focused ion beam (FIB) milling. Both scale bars represent 20 m. Reproduced with permission from [116]. …”

Section: Figurementioning

confidence: 99%

Micro-LEGO for MEMS

Kim

2019

Micromachines

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“…Recent works, however, have shown that a microcantilever specifically designed to realize internal resonance can trigger two modes even with single-frequency excitation. Specifically, in [73][74][75][76], a microcantilever was designed with an inner paddle, as shown in figure 6, so that the linearized frequencies of the leading bending modes of the base cantilever and the inner paddle are in a 1 : n rational relationship. When nonlinearity is included in the dynamics through the strong non-smooth nonlinear tip-sample interactions generated during the AFM tapping operation, a strong nth harmonic component is passively triggered in the response of the paddle via the internal resonance mechanism.…”

Section: Internal Resonancementioning

confidence: 99%

Nonlinear couplings and energy transfers in micro- and nano-mechanical resonators: intermodal coupling, internal resonance and synchronization

Asadi

Cho

2018

Phil. Trans. R. Soc. A.

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Extensive development of micro/nano-electromechanical systems (MEMS/NEMS) has resulted in technologies that exhibit excellent performance over a wide range of applications in both applied (e.g. sensing, imaging, timing and signal processing) and fundamental sciences (e.g. quantum-level problems). Many of these outstanding applications benefit from resonance phenomena by employing micro/nanoscale mechanical resonators often fabricated into a beam-, membrane- or plate-type structure. During the early development stage, one of the vibrational modes (typically the fundamental mode) of a resonator is considered in the design and application. In the past decade, however, there has been a growing interest in using more than one vibrational mode for the enhanced functionality of MEMS/NEMS. In this paper, we review recent research efforts to investigate the nonlinear coupling and energy transfers between multiple modes in micro/nano-mechanical resonators, focusing especially on intermodal coupling, internal resonance and synchronization.This article is part of the theme issue 'Nonlinear energy transfer in dynamical and acoustical systems'.

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“…Mode coupling among various modes of vibration of micro-and nano-electromechanical systems (MEMS and NEMS) has been explored for several interesting capabilities and potential applications, such as mass sensing [1,2], signals filtering [3] and timing/synchronization [4][5][6]. The wide implementation of mode coupling in N/MEMS in the past decade has been sparked by the exciting results demonstrated in the classical structure dynamics.…”

Section: Introductionmentioning

confidence: 99%

“…The coupling between different modes can be linear or nonlinear. The nonlinear coupling can be through a mechanical coupler within the involved structures [7,8] or via internal resonance [1,2,4,5,[9][10][11]. The majority of the reported nonlinear coupling studies are based on internal resonance [1,2,4,5,[9][10][11].…”

Section: Introductionmentioning

confidence: 99%

Theoretical and experimental investigations of the crossover phenomenon in micromachined arch resonator: part I—linear problem

et al. 2019

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We investigate, experimentally and theoretically, the linear mode coupling between the first symmetric and antisymmetric modes of an electrothermally tuned and electrostatically actuated micromachined arch resonator. The arch is excited using an antisymmetric partial electrode to activate both modes of vibrations. Theoretically, we explore the static and dynamic behavior using the Galerkin method. When tuning the electrothermal voltage, the first symmetric frequency increases while the first antisymmetric frequency decreases until they cross. The results show linear coupling and hybridization of both modes near crossing only in the presence of the perturbation from the electrostatic force using the partial electrode. We show the linear merging of both modes at crossing. Also, the eigenfrequency variation around crossing shows a ratio of 2:1 between the second symmetric mode and the first symmetric/antisymmetric modes, which can lead to simultaneous 1:1 and 2:1 internal resonances.

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Multi-frequency Atomic Force Microscopy based on enhanced internal resonance of an inner-paddled cantilever

Cited by 40 publications

References 42 publications

Micro-LEGO for MEMS

Micro-LEGO for MEMS

Nonlinear couplings and energy transfers in micro- and nano-mechanical resonators: intermodal coupling, internal resonance and synchronization

Theoretical and experimental investigations of the crossover phenomenon in micromachined arch resonator: part I—linear problem

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