Multi Degrees-of-Freedom Hybrid Piezoelectric-Electrostatic MEMS Actuators Integrated With Displacement Sensors

Rabih, Almur A. S.; Nabavi, Seyedfakhreddin; Ménard, Michaël; Nabki, Frederic

doi:10.1109/jmems.2023.3341039

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J. Microelectromech. Syst.

2024

DOI: 10.1109/jmems.2023.3341039

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Multi Degrees-of-Freedom Hybrid Piezoelectric-Electrostatic MEMS Actuators Integrated With Displacement Sensors

Almur A. S. Rabih,

Seyedfakhreddin Nabavi,

Michaël Ménard

et al.

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Multi Degrees-of-Freedom Hybrid Piezoelectric-Electrostatic MEMS Actuators Integrated With Displacement Sensors

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References 32 publications

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