2014 IEEE 28th Convention of Electrical &Amp; Electronics Engineers in Israel (IEEEI) 2014
DOI: 10.1109/eeei.2014.7005897
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Multi-channel wafer defect detection using diffusion maps

Abstract: Detection of defects on patterned semiconductor wafers is a critical step in wafer production. Many inspection methods and apparatus have been developed for this purpose. We recently presented an anomaly detection approach based on geometric manifold learning techniques. This approach is data-driven, with the separation of the anomaly from the background arising from the intrinsic geometry of the image, revealed through the use of diffusion maps. In this paper, we extend our algorithm to 3D data in multichanne… Show more

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Cited by 5 publications
(3 citation statements)
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References 22 publications
(24 reference statements)
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“…Saliency models are applied for defect detection on a wide variety of applications such as the semiconductor manufacturing and electronic production [14], metallic surfaces [15] or wafer defects [16], etc.…”
Section: Machine Vision: Defect Detectionmentioning
confidence: 99%
“…Saliency models are applied for defect detection on a wide variety of applications such as the semiconductor manufacturing and electronic production [14], metallic surfaces [15] or wafer defects [16], etc.…”
Section: Machine Vision: Defect Detectionmentioning
confidence: 99%
“…LP based out-of-sample extension for target detection was presented in [13]. Extensions of the anomaly detection algorithm [13], which utilizes LP for extension, include anomaly detection in side-scan sonar images of sea-mines [14] and detection of defects in wafers [15]. LP was utilized for function extension in problems related to voice activity detection.…”
Section: Introductionmentioning
confidence: 99%
“…In a fruit grading application presented in [125], saliency models were used for defect detection. Saliency models were used for detecting defects in semiconductor manufacturing [9], metallic surfaces [21] and wafers [134].…”
Section: Applications Based On Abnormality Detectionmentioning
confidence: 99%