2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) 2016
DOI: 10.1109/memsys.2016.7421830
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Multi-band asymmetric piezoelectric MEMS microphone inspired by the Ormia ochracea

Abstract: A multi-band piezoelectric directional MEMS microphone is demonstrated based on a bio-mimetic design inspired by the parasitoid fly Ormia ochracea, using the PiezoMUMPs multiuser foundry process. The device achieves a directional sound field response within four frequency bands, all lying below 15 kHz. It acts as a pressure gradient microphone with hyper-cardioid polar patterns in all frequency bands, with the measured mechanical sensitivity being in good agreement with acoustic-structural simulations conducte… Show more

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Cited by 22 publications
(19 citation statements)
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References 9 publications
(9 reference statements)
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“…Due to its relatively reduced complexity, insect hearing has been used as a model to inspire novel designs of miniaturized microphones [13][14][15]. Working towards that, we introduced a novel concept of a frequency-agile system bio-inspired by the auditory system of a moth -Noctua pronuba [16].…”
Section: Introductionmentioning
confidence: 99%
“…Due to its relatively reduced complexity, insect hearing has been used as a model to inspire novel designs of miniaturized microphones [13][14][15]. Working towards that, we introduced a novel concept of a frequency-agile system bio-inspired by the auditory system of a moth -Noctua pronuba [16].…”
Section: Introductionmentioning
confidence: 99%
“…Historically, potential advantages cited for piezoelectric MEMS microphones include no backplate, no required bias voltage, and a relatively large capacitance compared to capacitively transduced MEMS microphones. More recently, piezoelectric sensing has proven useful for prototyping microphones with unconventional geometries, such as microphones mimicking the hearing organs of insects [57] and human cochleas [8], and microphones employing dense cantilever arrays for “pre-filtering” captured sound [9]. …”
Section: Introductionmentioning
confidence: 99%
“…sound) in a limited time frame [1]. Designing acoustic sensors such as MEMS microphones, which are inspired by nature is not new [2][3][4]. Moreover, a novel acoustic bio-inspired concept was recently presented in [5] where the "transducer becomes part of the signal processing chain".…”
Section: Introductionmentioning
confidence: 99%