2007
DOI: 10.1109/tmag.2007.894013
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MTJ Elements With MgO Barrier Using RE-TM Amorphous Layers for Perpendicular MRAM

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Cited by 21 publications
(4 citation statements)
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“…In recent years, a great deal of attention has been paid to the material-engineering of ultrathin magnetic multilayer system having perpendicular magnetic anisotropy (PMA); with consideration to their prominence for advanced spin-transfer-torque fabrication challenges such as the requirement of high temperature for FePt [29][30][31][32][33][34]. On the other hand, multilayers such as Co/Pd, Co/Pt and Co/Ni multilayers provide an opportunity to tune the properties in a controllable manner.…”
Section: Introductionmentioning
confidence: 99%
“…In recent years, a great deal of attention has been paid to the material-engineering of ultrathin magnetic multilayer system having perpendicular magnetic anisotropy (PMA); with consideration to their prominence for advanced spin-transfer-torque fabrication challenges such as the requirement of high temperature for FePt [29][30][31][32][33][34]. On the other hand, multilayers such as Co/Pd, Co/Pt and Co/Ni multilayers provide an opportunity to tune the properties in a controllable manner.…”
Section: Introductionmentioning
confidence: 99%
“…Perpendicular magnetic anisotropy (PMA) materials with low saturation magnetization (Ms), low damping constant (α), and high spin polarization (P) are desired to meet the above-mentioned properties [1,2]. So far, several types of PMA materials such as Co/(Pt, Pd, Ni) multilayers [3][4][5][6][7][8], (Fe, Co)Pt ordered alloys [9,10], and TbFeCo and GdCoFe rare-earth alloys [11,12] have been extensively studied. Although many types of materials have been investigated, the window is still open for researchers to fabricate new materials for STT-MRAM applications.…”
Section: Introductionmentioning
confidence: 99%
“…The requirements on PMA electrodes include high thermal stability at reduced dimensions, low switching current and high TMR all at the same time. Various PMA materials have been studied for STT-MRAM electrodes, including (Co,Fe)/(Pt,Pd) multilayers [6][7][8], L1 0 -ordered (Co,Fe)Pt alloys [9][10][11], rareearth/transitional-metal (RE/TM) alloys [12,13], ultrathin CoFeB [14] and CoFeAl [15,16] films, and tetragonal manganese alloys such as Mn 3 Ga [17]. Despite of intensive research none of these materials satisfy strict requirements that would allow STT-MRAM to replace conventional memory today.…”
mentioning
confidence: 99%