Motion planning for coating process optimisation in electron beam physical vapour deposition

Cho, S.; Fuke, I.; Prabhu, Vittaldas V.

doi:10.1179/174329405x40948

Cited by 5 publications

(4 citation statements)

References 27 publications

(34 reference statements)

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“…Even though the vapor travels in straight lines, high-vacuum (low pressure) physical vapor deposition techniques such as electron beam-physical vapor deposition (EB-PVD) 20 can deposit coatings on many complex substrate shapes by careful optimization of substrate manipulation and source material emission rate. [21][22][23] However, substrates with interior surfaces, such as doublet guide vanes used to control gas flow in gas turbine engines, 24,25 contain regions that are hidden from sight of the vapor source for all substrate orientations. In order for vapor molecules to access these hidden regions during PVD, the mean free path (MFP) between gas molecule collisions must be smaller than the length of the opening to the inner substrate surfaces.…”

Section: Introductionmentioning

confidence: 99%

Vapor deposition on doublet airfoil substrates: Coating thickness control

Rodgers

Zhao

Wadley

2015

Journal of Vacuum Science &Amp; Technology A: Vacuum, Surfaces, and Films

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A combined simulation and experimental approach is used to investigate vapor deposition onto model doublet guide vane substrates found in gas turbine engines. These substrates contain surface regions that are not visible to the vapor source. Particular attention is given to coatings on interior surfaces of the doublet airfoil geometry, which are only accessible through the leading and trailing openings of the doublet airfoil substrate. Deposition of nickel is simulated for several flow conditions and vane separation distances, using a direct simulation Monte Carlo method. The simulated coating thickness predictions are then evaluated by comparison with experimentally deposited nickel coatings. Coating uniformity along interior surfaces was found to be highly sensitive to deposition conditions, and to the separation distance between the pair of airfoils. Coating thickness on these surfaces were found to vary with the ratio of laminar flow distance through the interairfoil channel to the transverse diffusion distance across the channel gap; a parameter which can be applied to optimize the coating of many interior channel-like substrate using gas jet assisted deposition concepts. V

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Section: Introductionmentioning

confidence: 99%

Vapor deposition on doublet airfoil substrates: Coating thickness control

Rodgers

Zhao

Wadley

2015

Journal of Vacuum Science &Amp; Technology A: Vacuum, Surfaces, and Films

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“…The cosine law of emission and related models has been used to predict the deposition thickness of simple planar substrates (Glang, 1976;Graper, 1973;Hill, 1986;Fancey and Matthews, 1993;James et al, 1995). Recently, a computational model for controlling thickness for workpieces with complex geometry such as turbine blades using finite-element techniques and a ray tracing algorithm has been developed (Cho et al, 2005). This computational model is generic and can be used for predicting deposition thickness on complex workpieces, for example, a jet nozzle and thruster.…”

Section: Multilayered Rhenium Coatingmentioning

confidence: 99%

“…However, it can provide significant improvement for the computation by reducing the number of states. The algorithm for generating motion plans to improve uniformity of the layer deposition based on the look-ahead approach has been developed (Cho et al, 2005). Although it has been demonstrated in this literature that the algorithm has focused on improving only uniformity, it can also be used for improving any objective in the same way.…”

Section: Motion Planning For Performance Improvementmentioning

confidence: 99%

Rapid manufacturing of rhenium components using EB‐PVD

Prabhu

Fuke

Cho

et al. 2005

Rapid Prototyping Journal

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Rapid manufacturing of rhenium components using EB-PVD Vittal V. Prabhu Indraneel V. Fuke Sohyung Cho Jogender Singh Article information:To cite this document: Vittal V.If you would like to write for this, or any other Emerald publication, then please use our Emerald for Authors service information about how to choose which publication to write for and submission guidelines are available for all. Please visit www.emeraldinsight.com/authors for more information. About Emerald www.emeraldinsight.comEmerald is a global publisher linking research and practice to the benefit of society. The company manages a portfolio of more than 290 journals and over 2,350 books and book series volumes, as well as providing an extensive range of online products and additional customer resources and services.Emerald is both COUNTER 4 and TRANSFER compliant. The organization is a partner of the Committee on Publication Ethics (COPE) and also works with Portico and the LOCKSS initiative for digital archive preservation. AbstractPurpose -The purpose of this paper is to provide insights for understanding the relationship between rapid manufacturing process for rhenium components in jet nozzle fabrication using electron beam-physical vapor deposition (EB-PVD). Specifically, to develop a methodology to characterize and improve this new process through motion planning for maintaining uniformity in the deposition thickness. Design/methodology/approach -This research first identifies several important objectives for the process, and then develops an optimized heuristic method based on a look-ahead approach to generate motion plans for uniform thickness objective. In this heuristic, the surface of the workpiece is modeled using finite element method and the accumulated thickness of each layer on each element is computed based on its location in the vapor plume using a ray casting algorithm. Findings -Computational experiments show that the proposed algorithm can potentially provide significant improvements in the uniformity of the layers and cost savings in manufacturing compared to prevailing practice, especially for low-volume production such as aerospace applications.Research limitations/implications -In this research, net-shaped jet nozzle has been fabricated using a graphite mandrel. Therefore, the mandrelbased approach can be limited to producing hollow components. Practical implications -The proposed method is very generic and thus can be applied for multi-material manufacturing process identifying the sweet spot of the intersecting vapor plumes. Originality/value -This research can help the EB-PVD process for rapid manufacturing which has been considered as financially expensive to be accepted in real practice by providing a relationship of the process-to-product transformation through the developed motion planning methods.

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“…Several deposition techniques are used to deposit thin (<1 μm) and thick (>1 μm) copper films. Physicalvapour-deposition (PVD) processes [17][18][19][20], like sputtering [21][22][23][24][25] and electron beam evaporation [26][27][28][29], Chemical-vapour-deposition (CVD) [30][31][32][33][34], atomic layer deposition (ALD) [35][36][37][38] methods are used to deposit high-quality, defect-free, continuous films; however, the average thickness of deposited films is generally less than 1 μm. Electroplating is used in those applications where the thick blanket film is required or blind/through holes must be filled.…”

Section: Introductionmentioning

confidence: 99%

A critical review of copper electroless deposition on glass substrates for microsystems packaging applications

Pawar

Dixit

2022

Surface Engineering

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This article reviews the state-of-the-art electroless copper deposition on glass substrates and the associated challenges.The well-known issue of poor adhesion of electroless copper with the glass substrate was addressed and later, improved bymodifying the surface energy using a specific chemical treatment or by creating localized surface roughening. Localized surfaceregions in the glass were created by abrasive-based ultrasonic machining and hightemperature electrochemical-discharge machiningtechniques. The effect of critical process parameters on the surface roughness and morphology was explained. Both qualitative andquantitative adhesion measurement techniques, such as cross-hatch tests and 90°/180°p eel adhesion tests, were presented. Theadhesion strength is affected by the surface roughness of the substrate and residual stress build-up in the film. As the build-up stresscan be released by the post-deposition annealing, the adhesion strength is further increased. Finally, the electroless coppertechnology in making through-glass-vias and embedded redistribution lines are presented.

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Motion planning for coating process optimisation in electron beam physical vapour deposition

Cited by 5 publications

References 27 publications

Vapor deposition on doublet airfoil substrates: Coating thickness control

Vapor deposition on doublet airfoil substrates: Coating thickness control

Rapid manufacturing of rhenium components using EB‐PVD

A critical review of copper electroless deposition on glass substrates for microsystems packaging applications

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