Phys. Chem. Chem. Phys.
 2023
DOI: 10.1039/d3cp02397d
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Morphology evolution of the aluminum surface in a fluorine-containing environment

Pengqi Hai,
Chao Wu,
Xiangdong Ding
et al.

Abstract: The interaction between aluminum (Al) and F and O atoms is essential to understand the etching process of Al and alumina (Al2O3) by fluorine-containing gases. In addition, it also has...

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