Morphology and structural and electrical parameters of float-zone Si(111) single crystals

Fritzler, K. B.; Trukhanov, E. M.; Kalinin, V. P.

doi:10.1134/s1063785015080088

Cited by 1 publication

(2 citation statements)

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“…The size parameters are taken from the crystal surface photographs in [15], see Fig. 2 for the corresponding numerical model with two ridge shapes considered.…”

Section: Mesh Generation and 3d Geometrymentioning

confidence: 99%

“…The same numerical procedures apply except for mesh refinement by the ridge. Smooth crystal shape is compared to surface with a ridge for 4" and 5" crystal diameters using two different pull rates and 1 0 0 and 1 1 1 crystal orientations and an undulated feature of the ridge is also introduced as reported in [15]. The crystal radiation reflector is considered for 5" crystal with 2.5 mm/min pull rate.…”

Section: Introductionmentioning

confidence: 99%

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Three-dimensional modelling of thermal stress in floating zone silicon crystal growth

Plāte¹,

Krauze

Virbulis

2018

IOP Conf. Ser.: Mater. Sci. Eng.

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Abstract.During the growth of large diameter silicon single crystals with the industrial floating zone method, undesirable level of thermal stress in the crystal is easily reached due to the inhomogeneous expansion as the crystal cools down. Shapes of the phase boundaries, temperature field and elastic material properties determine the thermal stress distribution in the solid mono crystalline silicon during cylindrical growth. Excessive stress can lead to fracture, generation of dislocations and altered distribution of intrinsic point defects. Although appearance of ridges on the crystal surface is the decisive factor of a dislocation-free growth, the influence of these ridges on the stress field is not completely clear. Here we present the results of thermal stress analysis for 4" and 5" diameter crystals using a quasi-stationary three dimensional mathematical model including the material anisotropy and the presence of experimentally observed ridges which cannot be addressed with axis-symmetric models. The ridge has a local but relatively strong influence on thermal stress therefore its relation to the origin of fracture is hypothesized. In addition, thermal stresses at the crystal rim are found to increase for a particular position of the crystal radiation reflector.

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“…The size parameters are taken from the crystal surface photographs in [15], see Fig. 2 for the corresponding numerical model with two ridge shapes considered.…”

Section: Mesh Generation and 3d Geometrymentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%