Morphology and optical properties of zinc oxide thin films grown on Si (100) by metal-organic chemical vapor deposition

Lan, Shan-Ming; Uen, Wu‐Yih; Chan, Chin-Hao; Chang, Kuo-Jen; Hung, S. C.; Li, Z. Y.; Yang, Tao; Chiang, Chin-Chen; Huang, P. J.; Yang, Miin-Shen; C., G.; Chang, C. Y.

doi:10.1007/s10854-008-9664-7

Cited by 8 publications

(8 citation statements)

References 13 publications

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“…In some cases in situ synthesis can be competitive [18]. Other methods are based, for instance, on electrochemical assembly [51,52], radio-frequency sputtering [53], metal-organic chemical vapor deposition [54], formation of nanocrystals in self-assembling fatty acid layers (socalled Langmuir-Blodgett technique) [55]. Recently synthesis of sulfide QDs from metal salts in dimethylsulfoxide has been reported [56].…”

Section: Introductionmentioning

confidence: 99%

CdS and ZnS quantum dots embedded in hyaluronic acid films

Khachatryan

Stobiński

et al. 2009

Journal of Alloys and Compounds

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Section: Introductionmentioning

confidence: 99%

CdS and ZnS quantum dots embedded in hyaluronic acid films

Khachatryan

Stobiński

et al. 2009

Journal of Alloys and Compounds

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“…During the deposition of thinner films, the grains grow approximately following a 2D model [18]. This results in the formation of hexagonal-shaped ZnO nanosheets with a high width/thickness ratio of up to 10.…”

Section: Resultsmentioning

confidence: 99%

Effect of thickness on structural and electrical properties of Al-doped ZnO films

et al. 2015

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“…During the deposition of thinner films, the grains grow approximately following a 2D model [Lan et al (2009)]. This results in the formation of hexagonal-shaped ZnO nanosheets with a high width/thickness ratio of up to 10.…”

Section: Resultsmentioning

confidence: 99%

Thickness Dependence of Crystalline Structure of Al-doped ZnO Thin Films Deposited by Spray Pyrolysis

Garcés

Budini

Arce

et al. 2015

Procedia Materials Science

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In this work, we have investigated the influence of thickness on crystalline structure of Al-doped ZnO films. Transparent conducting oxide films were grown by the spray pyrolysis technique from precursors prepared via the sol-gel method. We determined the structural properties of the films by performing X-ray diffraction and mosaicity measurements, which evidenced an increase of disorder and inhomogeneity between crystalline domains as the films thickened. This behavior was attributed to plastic deformation of the films as their thickness increased. Disorder is usually caused by internal stress in the crystalline structure of the film, which is due to diverse factors such as lattice and thermal mismatches between substrate and sample, postdeposition heat treatments, film growth parameters, film thickness, etc. Although there are several reports concerning stress-induced optical and electrical fluctuations of ZnO films, due to annealing or deposition processes, different substrates types and doping, the thickness dependence of structural characteristics is scarcely reported.

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Morphology and optical properties of zinc oxide thin films grown on Si (100) by metal-organic chemical vapor deposition

Cited by 8 publications

References 13 publications

CdS and ZnS quantum dots embedded in hyaluronic acid films

CdS and ZnS quantum dots embedded in hyaluronic acid films

Effect of thickness on structural and electrical properties of Al-doped ZnO films

Thickness Dependence of Crystalline Structure of Al-doped ZnO Thin Films Deposited by Spray Pyrolysis

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