2017
DOI: 10.3390/ma10111305
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Morphological Transition in Diamond Thin-Films Induced by Boron in a Microwave Plasma Deposition Process

Abstract: The purpose of this study is to understand the basic mechanisms responsible for the synthesis of nanostructured diamond films in a microwave plasma chemical vapor deposition (MPCVD) process and to identify plasma chemistry suitable for controlling the morphology and electrical properties of deposited films. The nanostructured diamond films were synthesized by MPCVD on Ti-6Al-4V alloy substrates using H2/CH4/N2 precursor gases and the plasma chemistry was monitored by the optical emission spectroscopy (OES). Th… Show more

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Cited by 5 publications
(3 citation statements)
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“…Subsequently, a significant amount of theoretical work has suggested various stable and metastable superhard modifications of boron-carbon systems [ 2 , 3 , 4 , 5 , 6 , 7 , 8 , 9 ]. Our previous study of low-level boron incorporation in diamond by microwave plasma chemical vapor deposition showed a significant change in the plasma gas-phase chemistry and morphology of the diamond films by the introduction of boron in a methane/hydrogen/nitrogen plasma [ 10 ]. The focus of this work is on the synthesis of metastable superhard boron-carbon composites from the gas phase using low-temperature microwave plasma chemical vapor deposition.…”
Section: Introductionmentioning
confidence: 99%
“…Subsequently, a significant amount of theoretical work has suggested various stable and metastable superhard modifications of boron-carbon systems [ 2 , 3 , 4 , 5 , 6 , 7 , 8 , 9 ]. Our previous study of low-level boron incorporation in diamond by microwave plasma chemical vapor deposition showed a significant change in the plasma gas-phase chemistry and morphology of the diamond films by the introduction of boron in a methane/hydrogen/nitrogen plasma [ 10 ]. The focus of this work is on the synthesis of metastable superhard boron-carbon composites from the gas phase using low-temperature microwave plasma chemical vapor deposition.…”
Section: Introductionmentioning
confidence: 99%
“…Every case was classified following 3 degrees of SOFA score steps in relation to mortality risk: <3, 3–9, and >9. For trauma, we used the Injury Severity Score (ISS) classification [ 32 ]. Data were analyzed with statistic chi-square test, considering p < 0.05 as statistically significant.…”
Section: Methodsmentioning
confidence: 99%
“…Thus, the superior properties of a-C arise from adjustable E opt , which can extend to visible light [8,9]. This is an effective way to adjust the E opt with doping boron, nitrogen and phosphorus [10], which can form n-type or p-type semiconductors [11,12]. For example, nitrogen/phosphorus incorporate a-C is n-type semiconductor, and E opt decreases from 2.5 eV to 1.6 eV with increasing nitrogen content [11].…”
Section: Introductionmentioning
confidence: 99%