Morphological, structural and mechanical properties of NbN thin films deposited by reactive magnetron sputtering

Sandu, Cosmin S.; Benkahoul, M.; Parlinska-Wojtan, Magdalena; Sanjinés, R.; Lévy, F.

doi:10.1016/j.surfcoat.2005.11.054

Cited by 51 publications

(34 citation statements)

References 15 publications

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“…Therefore, for the solid solutions and the amorphous matrix, a more realistic structure is Nb x Al 1-x N y O 1-y , where x ~ 0.67 and 1 -y << 1, and a-AlNO, respectively. For NbN coatings prepared by magnetron sputtering, the effect of pressure [88] and substrate bias [89] on the phase composition of the coating was studied by XRD (Figs. 7, 8).…”

Section: Crystal Structure and Morphology Of Nbn-based Coatingsmentioning

confidence: 99%

Structure and physicomechanical properties of NbN-based protective nanocomposite coatings: A review

Pogrebnjak

Rogoz

Бондар

et al. 2016

Prot Met Phys Chem Surf

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Abstract-This review summarizes the present-day achievements in the study of the structure and properties of protective nanocomposite coatings based on NbN, NbAlN, and NbSiN prepared by a variety of modern deposition techniques. It is shown that a change in deposition parameters has a significant effect on the phase composition of the coatings. Depending on the magnitude of negative potential on the substrate, the pressure of nitrogen or a nitrogen-argon mixture in the chamber, and the substrate temperature, it is possible to obtain coatings containing different phases, such as NbN and SiN x (Si 3 N 4 ), AlN, and NbAl 2 N. It is found that, in the case of formation of the ε-NbN phase, the coatings become very hard; their hardness achieves values on the order of 53 GPa. At the same time, they remain thermally stable at temperatures of up to 600°C, chemically inert, and resistant to wear. The effect of the nanograin size, the volume fraction of boundaries and interfaces, and the point defect concentration on the physicomechanical properties of these coatings is described. Niobium nitride-based coatings can be used in superconducting systems and single-photon detectors; they are capable of operating under the action of strong magnetic fields of up to 20 T; they can be used in integrated logic circuits and applied as protective coatings of machine parts, edges of cutting tools, etc.

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Section: Crystal Structure and Morphology Of Nbn-based Coatingsmentioning

confidence: 99%

Structure and physicomechanical properties of NbN-based protective nanocomposite coatings: A review

Pogrebnjak

Rogoz

Бондар

et al. 2016

Prot Met Phys Chem Surf

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“…Only few studies on NbN were emphasized on its mechanical properties. The NbN system consists of several phases and in most cases the NbN films show a mixed phase condition [7].…”

Section: Niobium Nitride Films Have Good Mechanicalmentioning

confidence: 99%

Mechanical and Chemical Characterization of NbN_xCoatings Deposited by ICP Assisted DC Magnetron Sputtering

Jun¹,

Kim²,

Kim³

et al. 2014

Journal of the Korean Society for Heat Treatment

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Niobium nitride coatings have many potential thin film applications due to their chemical inertness, good mechanical properties, temperature stability and superconducting properties. In this study, NbN x coatings were prepared by inductively coupled plasma (ICP) assisted DC magnetron sputtering method on the surface of AISI 304 austenitic stainless steels. Effects of target power were studied on mechanical and chemical properties of the coatings. The coating structure was analyzed by X-ray diffraction (XRD) and field emission scanning electron microscopy (FESEM). The coating hardness was measured by micro-knoop hardness tester. The coating thickness was measured using a 3D profiler and wear characteristics were estimated using a ball-on-disk wear tester. The thickness of the NbN 4000 hardness above Nb target power of 300 W. Hexagonal δ'-NbN phase and cubic δ-NbN phase were observed in the coating films and the hardness of the NbN x coatings was higher when these two peaks were mixed. The corrosion resistance increased with the increase of the Nb target power.

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“…NbN x coatings are generally characterised by high hardness and thermal stability [1][2][3][4][5], but the main interest in the material was originally due to its superconducting properties [6]. Compared with other common binary transition metal nitrides like TiN and CrN, the Nb-N system presents a higher complexity as a variety of crystallographic phases can be formed [7].…”

Section: Introductionmentioning

confidence: 99%

“…Compared with other common binary transition metal nitrides like TiN and CrN, the Nb-N system presents a higher complexity as a variety of crystallographic phases can be formed [7]. The maximum hardness was found for coatings exhibiting the hexagonal structure of b-Nb 2 N, d 0 -NbN and e-NbN with values up to 40 GPa, whereas the face-centred cubic (fcc) d-NbN coatings showed a hardness in the range of 25-30 GPa [1][2][3][4][5]. Details about the tribological properties of the different NbN x phases can be found in Refs.…”

Section: Introductionmentioning

confidence: 99%

Tribological Properties of Arc-Evaporated NbAlN Hard Coatings

et al. 2011

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Nb 1-x Al x N hard coatings were synthesised by cathodic arc-evaporation with different Al contents to study its influence on the tribological properties. Ball-ondisc tests at temperatures up to 700°C were performed and the recorded coefficient of friction was generally in the range from 0.8 to 1.0. Subsequent analysis of the coating wear track and the counterpart wear scar by optical profilometry and Raman spectroscopy revealed details on the wear behaviour of the tested coatings. The best wear performance for the Nb-rich coatings was in the temperature range of 300-500°C, whereas at the maximum testing temperature the higher oxidation resistance with increasing Al content was beneficial in terms of wear resistance.

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Morphological, structural and mechanical properties of NbN thin films deposited by reactive magnetron sputtering

Cited by 51 publications

References 15 publications

Structure and physicomechanical properties of NbN-based protective nanocomposite coatings: A review

Structure and physicomechanical properties of NbN-based protective nanocomposite coatings: A review

Mechanical and Chemical Characterization of NbN_xCoatings Deposited by ICP Assisted DC Magnetron Sputtering

Tribological Properties of Arc-Evaporated NbAlN Hard Coatings

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Morphological, structural and mechanical properties of NbN thin films deposited by reactive magnetron sputtering

Cited by 51 publications

References 15 publications

Structure and physicomechanical properties of NbN-based protective nanocomposite coatings: A review

Structure and physicomechanical properties of NbN-based protective nanocomposite coatings: A review

Mechanical and Chemical Characterization of NbNxCoatings Deposited by ICP Assisted DC Magnetron Sputtering

Tribological Properties of Arc-Evaporated NbAlN Hard Coatings

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Mechanical and Chemical Characterization of NbN_xCoatings Deposited by ICP Assisted DC Magnetron Sputtering