More-energetic vapors of in situ plasmon-activated water as an environmentally friendly etchant

Kao, Wei-Yu; Yu, Shih-Hao; Mai, Fu-Der; Tsai, Hui-Yen; Chen, Jing-Wei; Liu, Yu-Chuan

doi:10.1016/j.jiec.2024.05.040

Journal of Industrial and Engineering Chemistry

2024

DOI: 10.1016/j.jiec.2024.05.040

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More-energetic vapors of in situ plasmon-activated water as an environmentally friendly etchant

Wei-Yu Kao,

Shih-Hao Yu,

Fu-Der Mai

et al.

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More-energetic vapors of in situ plasmon-activated water as an environmentally friendly etchant

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References 59 publications

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