Monte Carlo simulation of radio‐frequency plasmas in N₂

Abstract

SUMMARYThe structure of radio-frequency (rf) discharges in N 2 is examined for the electrons and positive ions, in which electron-neutral collisions and ion-neutral collisions are taken into consideration. Some detailed properties of rf plasmas sustained by an rf source voltage of 13.56 MHz and an amplitude of 200 V are presented using Monte Carlo simulation in electropositive gas (N 2 ). It is shown that most of the rf external electric field is absorbed in the sheath regions, whereas electrons respond easily to the oscillating rf electric field, ions cannot oscillate with the rf electric field. The oscillations of the electron cloud determine the instantaneous sheath thickness near each electrode. The mean energy and the density of charged particles are also discussed.

An Overview of the Research of Plasma Sheath

“…One basis of Monte Carlo simulation is random number generation [19]. The Monte Carlo simulation for radio frequency discharges was studied by Settaouti and Settaouti [20]. They found that the oscillations of the electron cloud determine the instantaneous sheath thickness near each electrode and most radio frequency external electric field is absorbed in the sheath regions.…”