1998
DOI: 10.1002/sca.4950200803
|View full text |Cite
|
Sign up to set email alerts
|

Monte carlo simulation of charging effects in linewidth metrology (II): On insulator substrate

Abstract: Summary:Charging effects have been investigated quantitatively using Monte Carlo (MC) simulation when the linewidth of polymethylmethacrylate (PMMA) insulator patterns on SiO, insulator substrate are measured by scanning electron mi'croscope (SEM). We established reference operating and shape conditions for array patterns and we have calculated the offset on linewidth metrology according to the change in each condition. We have used a 50% threshold algorithm for the edge determination, calculated the offsets i… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
3

Citation Types

0
3
0

Year Published

2002
2002
2019
2019

Publication Types

Select...
7

Relationship

0
7

Authors

Journals

citations
Cited by 10 publications
(3 citation statements)
references
References 7 publications
0
3
0
Order By: Relevance
“…Bernstein et al [3] investigated the effect of SEII on the quality of SEM images of high resolution, and devised a method to reduce its influence. Ko & Chung [4] studied the effect of charge on the image quality of the insulating material under the electron beam.…”
Section: Introductionmentioning
confidence: 99%
“…Bernstein et al [3] investigated the effect of SEII on the quality of SEM images of high resolution, and devised a method to reduce its influence. Ko & Chung [4] studied the effect of charge on the image quality of the insulating material under the electron beam.…”
Section: Introductionmentioning
confidence: 99%
“…These phenomena deteriorate the accuracy of the measurement in SEM and pattern formation in EB lithography. Although several studies have been carried out to examine these phenomena, [1][2][3][4][5][6][7][8][9][10][11][12][13] the mechanism is not yet completely understood. One of the difficulties in understanding charging arises from the dependence on the specimen geometry.…”
Section: Introductionmentioning
confidence: 99%
“…Numerical simulation is a useful tool to study this problem. [4][5][6][7][8][9][10][11][12][13] It can handle various kinds of samples just by programming their geometrical configuration. It can also provide the deposited charge distribution in insulating materials, which is difficult to measure experimentally.…”
Section: Introductionmentioning
confidence: 99%