2007
DOI: 10.1016/j.nimb.2006.12.085
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Monte Carlo simulation of charge exchange processes in the scattering of 4keV He+ ions by an amorphous silicon surface

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Cited by 3 publications
(2 citation statements)
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“…Monte Carlo simulations [22] based on the TRIM-85 code (TRansport of Ions in Matter) [6] were performed for He + ions with incident energy of 2 and 10 keV and Ag foils. For each energy two thicknesses were considered (50 and 200 Å for 2 keV and 200 and 800 Å for 10 keV).…”
Section: Resultsmentioning
confidence: 99%
“…Monte Carlo simulations [22] based on the TRIM-85 code (TRansport of Ions in Matter) [6] were performed for He + ions with incident energy of 2 and 10 keV and Ag foils. For each energy two thicknesses were considered (50 and 200 Å for 2 keV and 200 and 800 Å for 10 keV).…”
Section: Resultsmentioning
confidence: 99%
“…Monte Carlo approach shows more precise treatment of elastic scattering and it allows the determination of angular and energy distributions. The program TRIM is developed based on the Monte Carlo approach and describes multiple scattering of projectiles near the solid surface [2]. The results obtained acquired averaging over many simulated particle trajectories [1].…”
Section: Introductionmentioning
confidence: 99%