MONOX: a characterization tool for the X-UV range

André, Jean‐Michel; Avila, Antoine; Barchewitz, R.; Benbalagh, Rabah; Delaunay, Renaud; Druart, D.; Jonnard, Philippe; Ringuenet, H.

doi:10.1051/epjap:2005047

Cited by 10 publications

(10 citation statements)

References 15 publications

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“…Regarding the reflectance, it decreases by a factor slightly less than 4 when going from the MM to the EM whatever the range, see Table . Two reasons for this large variation have been identified as follows: The Γ ratio of the grating is only 0.18 because of an over‐etching; this is not the optimum value, which is in the 0.25–0.35 range; a Γ ratio in this range would have limited the reflectivity decrease to only 30%; The first step of the patterning process is the deposition of a SiO 2 layer requiring that the sample stays at 300 °C during at least 15 min; this condition leads to a degradation of the MM structural quality, as we have checked from reflectivity measurements in the Cu L (930 eV, 1.33 nm) range with the MONOX spectro‐goniometer; preliminary silica depositions at 150 °C show that the MM reflectance is unaffected by this temperature annealing.…”

Section: Preparation and Characterization Of The Multilayer Gratingmentioning

confidence: 99%

An etched multilayer as a dispersive element in a curved‐crystal spectrometer: implementation and performance

et al. 2012

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Etched multilayers obtained by forming a laminar grating pattern within interferential multilayer mirrors are used in the soft x-ray range to improve the spectral resolution of wavelength dispersive spectrometers equipped with periodic multilayers. We describe the fabrication process of such an etched multilayer dispersive element, its characterizationthrough reflectivity measurement and simulations, and its implementation in a high-resolution Johann-type spectrometer. The specially designed patterning of a Mo/B 4 C multilayer is found fruitful in the range of the C K emission as the diffraction pattern narrows by a factor 4 with respect to the non-etched structure.This dispersive element with an improved spectral resolution was successfully implemented for electronic structure study with an improved spectral resolution by x-ray emission spectroscopy. As first results we present the distinction between the chemical states of carbon atoms in various compounds, such as graphite, SiC and B 4 C, bythe different shape of their C K emission band.

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Section: Preparation and Characterization Of The Multilayer Gratingmentioning

confidence: 99%

An etched multilayer as a dispersive element in a curved‐crystal spectrometer: implementation and performance

et al. 2012

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“…The EM is first inserted in the MONOX goniometer [22] used as a plane spectrometer operating in the WDS mode. A boron carbide (B 4 C) thin film deposited onto a silicon substrate is used as the target in the X-ray tube.…”

Section: Insertion In a Plane Spectro-goniometermentioning

confidence: 99%

Design, development and applications of etched multilayers for soft X-ray spectroscopy

Guen

Benbalagh

André

et al. 2017

Eur. Phys. J. Appl. Phys.

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Abstract. An etched multilayer, a 2D structure fabricated by etching a periodic multilayer according to the pattern of a laminar grating, is applied in the soft X-ray range to improve the spectral resolution of wavelength dispersive spectrometers. The present article gathers all the successive stages of the development of such a device optimized to analyze the characteristic emission of light elements: design, structural and optical characterization and applications to X-ray spectroscopy. The evolution of the shape of the C Kα emission band of highly oriented pyrolytic graphite (HOPG), as a function of the angle between the emission direction and the (0 0 0 1) planes, is measured. These results, compared to those with a grating, demonstrate that the achieved spectral resolution enables disentangling σ → 1s and π → 1s transitions within the C K emission band.

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“…We test the performances of the system DUVEX by means of the MONOX facility [1]. The radiation emitted by the soft-x-ray source was monochromatized with the help of crystals or multilayer Bragg mirrors setup in the monochromator unit of MONOX.…”

Section: Tests At Various Emission Lines In the Soft-x-ray Rangementioning

confidence: 99%

“…This work was initially motivated by the development of a counting system dedicated to soft-x-ray and E-UV (Extreme UV) radiation, in particular at the 30.4 nm wavelength (40.75 eV) corresponding to the He II emission line and compatible with radiation sources emitting parasitic visible light. Such sources are discharge lamps or modified Coolidge x-ray tube as the one setup in our laboratory reflectometer [1], both of them being a source of relatively intense visible light flux. Standard detectors for this spectral domain such as photodiodes or channeltrons were unsuccessfully tested for this purpose.…”

Section: / Introductionmentioning

confidence: 99%

DUVEX: An X-ray counting system based on YAG:Ce scintillator

André

Guen

Jonnard

et al. 2011

Nuclear Instruments and Methods in Physics Research Section A:

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10 pagesInternational audienceA detector system, called DUVEX, has been developed for the soft-x-ray and extreme ultraviolet domain. It consists of a YAG:Ce scintillator coupled to a photomultiplier module working under vacuum in counting mode. The design and the performances of this detector in terms of yield, absolute efficiency, response and noise are reported. Spectra in the soft x-ray range of different elements (W, Ag, Al, Mg, Cu, N, C and B) obtained in WDS mode using this detector are presented. DUVEX appears as a competitive detection tool in terms of cost and easiness of implementation

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MONOX: a characterization tool for the X-UV range

Cited by 10 publications

References 15 publications

An etched multilayer as a dispersive element in a curved‐crystal spectrometer: implementation and performance

An etched multilayer as a dispersive element in a curved‐crystal spectrometer: implementation and performance

Design, development and applications of etched multilayers for soft X-ray spectroscopy

DUVEX: An X-ray counting system based on YAG:Ce scintillator

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