1988
DOI: 10.1002/mop.4650010402
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Monolithically integrated coplanar 75‐GHz silicon impatt oscillator

Abstract: Planar IMPATT diodes have been fabricated for W‐band operation on high‐resistivity silicon substrates. The active layers are grown by silicon molecular beam epitaxy. The diodes are monolithically integrated in a coplanar disc resonator. Good DC characteristics have been achieved. Oscillations have been detected at a frequency of 76 GHz with a continuous wave output power of about 1 mW.

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Cited by 16 publications
(2 citation statements)
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“…Several coplanar oscillator designs have already been discussed [51], [52]. In the slot-line oscillator, the coplanar IMPATT diode is connected to the center of a slot line [52].…”
Section: B Oscillatorsmentioning
confidence: 99%
See 1 more Smart Citation
“…Several coplanar oscillator designs have already been discussed [51], [52]. In the slot-line oscillator, the coplanar IMPATT diode is connected to the center of a slot line [52].…”
Section: B Oscillatorsmentioning
confidence: 99%
“…For monolithic integration of IMPATT diodes, a coplanar device structure is advantageous [51], [52]. Fig.…”
Section: Impatt Diodesmentioning
confidence: 99%