2005
DOI: 10.1109/jstqe.2005.846525
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Monolithically integrated active components: a quantum-well intermixing approach

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Cited by 80 publications
(32 citation statements)
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“…To address these problems, monolithic integration may provide possible solutions [1] . For example, using the on -chip integration method, device -to -device coupling problem can be completely eliminated, conveniently leading to a signifi cant decrease in packaging costs and sizes.…”
Section: Monolithic Integration Techniquesmentioning
confidence: 99%
“…To address these problems, monolithic integration may provide possible solutions [1] . For example, using the on -chip integration method, device -to -device coupling problem can be completely eliminated, conveniently leading to a signifi cant decrease in packaging costs and sizes.…”
Section: Monolithic Integration Techniquesmentioning
confidence: 99%
“…In this paper, we have investigated a fabrication procedure of a multi-bandgap III-V-OI wafer for active/passive integration on III-V CMOS photonics platform by using quantum well intermixing (QWI) [7]. The implant enhanced interdiffusion (IEI) method [7], which relies on the diffusion of point defects created during ion implantation, induces blue shift in bandgap energy of multiquantum well (MQW), enabling a multi-bandgap III-V-OI wafer.…”
Section: Introductionmentioning
confidence: 99%
“…The implant enhanced interdiffusion (IEI) method [7], which relies on the diffusion of point defects created during ion implantation, induces blue shift in bandgap energy of multiquantum well (MQW), enabling a multi-bandgap III-V-OI wafer.…”
Section: Introductionmentioning
confidence: 99%
“…Various methods have been studied to control the QW intermixing in GaAs and InPbased QW structures [14][15][16]. Among them, impurity-free vacancy-enhanced disordering (IFVD) has been proved to be a simple and effective method on InGaAs/GaAs QW intermixing with minor side effects on the crystal quality and optical performance.…”
Section: Introductionmentioning
confidence: 99%