2006
DOI: 10.1117/12.644687
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Monolithic silicon optoelectronic devices for protein and DNA detection

Abstract: A new class of miniaturized monolithic silicon optoelectronic transducers properly functionalized to biosensors is outlined. The devices are based on biofunctionalized optocoupler arrays made on silicon by employing mainstream silicon integrated circuit technology. The optocouplers consist of silicon avalanche diodes operating as light emitting devices self aligned to thin silicon nitride waveguides and silicon detectors. Bioanalytical results that demonstrate the efficiency of the device are provided and incl… Show more

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Cited by 2 publications
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“…One of the two substrates is a structured substrate plate containing channels in a surface thereof, and the other substrate is a lid plate that is bonded to the structured substrate plate to enclose the channel network. With the novel method [14] that we describe in this work, low temperature (80 • C) bonding between the PDMS and PMMA plates, as well as between two PMMA plates using an intermediate thin layer of PDMS, is demonstrated without the need for a significant pressure application. The method is based on surface modification of the substrates to be bonded, comprising introduction of Si-containing bonds on the organic surfaces and plasma modification.…”
Section: Introductionmentioning
confidence: 99%
“…One of the two substrates is a structured substrate plate containing channels in a surface thereof, and the other substrate is a lid plate that is bonded to the structured substrate plate to enclose the channel network. With the novel method [14] that we describe in this work, low temperature (80 • C) bonding between the PDMS and PMMA plates, as well as between two PMMA plates using an intermediate thin layer of PDMS, is demonstrated without the need for a significant pressure application. The method is based on surface modification of the substrates to be bonded, comprising introduction of Si-containing bonds on the organic surfaces and plasma modification.…”
Section: Introductionmentioning
confidence: 99%