2021
DOI: 10.1038/s41598-021-99500-9
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Monolithic processing of a layered flexible robotic actuator film for kinetic electronics

Abstract: Low-invasive soft robotic techniques can potentially be used for developing next-generation body–machine interfaces. Most soft robots require complicated fabrication processes involving 3D printing and bonding/assembling. In this letter, we describe a monolithic soft microrobot fabrication process for the mass production of soft film robots with a complex structure by simple 2D processing of a robotic actuator film. The 45 µg/mm2 lightweight film robot can be driven at a voltage of CMOS compatible 5 V with 0.1… Show more

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Cited by 7 publications
(5 citation statements)
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References 51 publications
(41 reference statements)
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“…The current operation voltage is quite high, but it is more than 3 times smaller than that previously used [42]. Moreover, it is expected to be reduced to the commercial battery tension by reducing the technologically induced magnetic anisotropy and by reducing the PMNPT layer thickness with the use of modern nanoelectromechanical systems technologies [51,52].…”
Section: Discussionmentioning
confidence: 99%
“…The current operation voltage is quite high, but it is more than 3 times smaller than that previously used [42]. Moreover, it is expected to be reduced to the commercial battery tension by reducing the technologically induced magnetic anisotropy and by reducing the PMNPT layer thickness with the use of modern nanoelectromechanical systems technologies [51,52].…”
Section: Discussionmentioning
confidence: 99%
“…These actuators require smaller, lighter, and larger deformations. Many types of actuators exist, e.g., piezoelectric actuators using the inverse piezoelectric effect [6,7], shape memory alloy actuators using the shape memory effect [8,9], and bimetallic actuators using the difference in thermal deformation [10]. In all these, it is difficult to obtain a large self‐generated deformation.…”
Section: Introductionmentioning
confidence: 99%
“…Decades of industrial development and scientific research have led to increasing use of robotics in daily life and engineering tasks. This field has become extremely active with the recent developments of soft pneumatic robotics that have excellent deformability, adaptability in unstructured environments and safety for human–machine interaction due to their inherent softness. To further extend the capabilities of these soft robotics, sensorized actuators that can respond to external stimuli and sense self-deformation by mimicking biological systems are desirable. Efforts in self-sensing robotics have combined soft actuators with flexible sensors to either ensure a stable and self-adaptive deformation in response to the surrounding environment or use the information generated by the sensors to accurately regulate the control system for actuation. However, recent soft robotics have difficulties in ideally matching with conventional add-on sensors, generally suffering from incompatible surface interaction, poor connection, along with possible stress concentration, and manufacturing complexity. …”
Section: Introductionmentioning
confidence: 99%