2021
DOI: 10.1126/science.abh3551
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Monolithic optical microlithography of high-density elastic circuits

Abstract: Polymeric electronic materials have enabled soft and stretchable electronics. However, the lack of a universal micro/nanofabrication method for skin-like and elastic circuits results in low device density and limited parallel signal recording and processing ability relative to silicon-based devices. We present a monolithic optical microlithographic process that directly micropatterns a set of elastic electronic materials by sequential ultraviolet light–triggered solubility modulation. We fabricated transistors… Show more

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Cited by 191 publications
(201 citation statements)
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References 36 publications
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“…Aryl diazirine reagents already find broad application in biological target identification, small molecule capture, and protein- and polymer-crosslinking, as well as in experimental adhesives for both commodity polymers and living tissue. 54 However, in the vast majority of cases, the structure of the diazirine unit within these reagents has been chosen based on synthetic expedience rather than a consideration of what electronic properties might be optimal. In other words, all aryl diazirines have been assumed to be more or less equivalent in their ability to function as reactive “warheads”.…”
Section: Discussionmentioning
confidence: 99%
“…Aryl diazirine reagents already find broad application in biological target identification, small molecule capture, and protein- and polymer-crosslinking, as well as in experimental adhesives for both commodity polymers and living tissue. 54 However, in the vast majority of cases, the structure of the diazirine unit within these reagents has been chosen based on synthetic expedience rather than a consideration of what electronic properties might be optimal. In other words, all aryl diazirines have been assumed to be more or less equivalent in their ability to function as reactive “warheads”.…”
Section: Discussionmentioning
confidence: 99%
“…There were two steps in realizing the wearable applications while using the proposed random laser. First, the optical excitation should be replaced with indirect pumping or electrical pumping [35]. Regarding indirect pumping, the laser diode (LD) or light-emitting diode (LED) can be used as a pump source.…”
Section: Resultsmentioning
confidence: 99%
“…Figure S25 shows an example of these designed photocrosslinkers that enable NC patterning at 365 nm. Photogenerated carbene and related chemistry, recently adopted to cross-link inert polymers and pattern polymeric organic electronic circuits ( 51 ), can work as well for patterning perovskite NCs. The subtle differences in the underlying photochemistry and reaction kinetics of photogenerated nitrene and carbene may offer an additional degree of tunability in DOPPLCER.…”
Section: Discussionmentioning
confidence: 99%