Monolithic Ni-electroplated microstructure and its application in micro mirrors and micro assembly

Chiu, Yi; W.Lai, W.Lai; Chang, Chun-Hao; Chang, Chun-Po; Chen, Ching-Hung; Lai, Chih-Hsiang; Hsu, Wei-Chou

doi:10.1109/omn.2014.6924611

2014 International Conference on Optical MEMS and Nanophotonics 2014

DOI: 10.1109/omn.2014.6924611

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Monolithic Ni-electroplated microstructure and its application in micro mirrors and micro assembly

Yi Chiu

W.Lai W.Lai²,

Chun-Hao Chang³

et al.

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Monolithic Ni-electroplated microstructure and its application in micro mirrors and micro assembly

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References 6 publications

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