Monolithic MEMS-CMOS ultrasonic rangefinder based on dual-electrode PMUTs

Rozen, Ofer; Block, Scott T.; Mo, Xuan; Bland, Westley; Hurst, P.J.; Tsai, J. M.; Daneman, M.; Amirtharajah, Rajeevan; Horsley, David A.

doi:10.1109/memsys.2016.7421571

Cited by 29 publications

(23 citation statements)

References 5 publications

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“…The present array achieves a fill factor of 67%. Compared with those of previously published PMUT arrays, (13,(21)(22)(23) the fill factor of the PMUT array proposed in this paper is improved by about 20-168%, which is attributed to the reusable design of etching holes in the PMUT array, and the proposed PMUT array features both the very small PMUT size and the very small pitch between PMUTs. The magnified view in Fig.…”

Section: Microfabrication Techniquementioning

confidence: 63%

High Fill Factor Array of Piezoelectric Micromachined Ultrasonic Transducers with Large Quality Factor

Ding¹,

Ni²,

Wang³

et al. 2020

Sensors and Materials

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In this paper, we present a novel piezoelectric micromachined ultrasonic transducer (PMUT) array with a high fill factor and a large quality factor (Q). With the reusable design of etching holes, the pitch between PMUTs is effectively minimized, improving the fill factor of the array. With a newly developed surface micromachining process, the fabricated PMUT array only needs few etching holes to release the structure, and all sealed etching holes are removed from the resonance region, achieving a large Q. The demonstrated process facilitates low-cost volume manufacturing. As a result, a 50 × 50 PMUT array containing 48-μm-diameter PMUTs with a 52 μm pitch achieves a high fill factor of 67%. For an individual PMUT, a large Q of 351 is achieved at a center frequency of 12.62 MHz, the peak displacement is 3.25 nm/V, and the effective electromechanical coupling coefficient is 1.6%. The achieved high fill factor and large Q render the proposed PMUT array promising in applications such as flow sensing, chemical detection, and energy transmission.

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Section: Microfabrication Techniquementioning

confidence: 63%

High Fill Factor Array of Piezoelectric Micromachined Ultrasonic Transducers with Large Quality Factor

Ding¹,

Ni²,

Wang³

et al. 2020

Sensors and Materials

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show abstract

“…Piezoelectric micromachined ultrasonic transducers (PMUTs) are layered plates with a piezoelectric active layer used for emitting and receiving ultrasonic waves [8][9][10]. Nowadays, they are used for many applications like range-finding [11][12][13], gesture recognition [14], finger-printing recognition [15], exploiting the in-air propagation [16], ultrasound imaging [17,18] and sonography [18] in which the in-water propagation is involved [19]. Further applications are represented by non-destructive testing, velocity sensing [20].…”

Section: Introductionmentioning

confidence: 99%

On the Effects of Package on the PMUTs Performances—Multiphysics Model and Frequency Analyses

et al. 2020

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This paper deals with a multiphysics numerical modelling via finite element method (FEM) of an air-coupled array piezoelectric micromachined ultrasonic transducers (PMUTs). The proposed numerical model is fully 3D with the following features: the presence of the fabrication induced residual stresses, which determine a geometrically non-linear initial deformed configuration of the diaphragms and a remarkable shift of the fundamental frequency; the multiple coupling between different physics, namely electro-mechanical-coupling for the piezo-electric model, acoustic-structure interaction at the acoustic-structure interface and pressure acoustics in the surrounding air. The model takes into account the complete set of PMUTs belonging to the silicon die in a 4 × 4 array configuration and the protective package, as well. The results have been validated by experimental data, in terms of initial static pre-deflected configuration of the diaphragms and frequency response function of the PMUT. The numerical procedure was applied, to analyze different package configurations of the device, to study the influence of the holes on the acoustic transmission in terms of SPL and propagation pattern and consequently extract a set of design guidelines.

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“…Piezoelectric Micromachined Ultrasonic Transducers (PMUTs) are layered diaphragms with a piezoelectric active layer to emit and receive ultrasonic pressure waves [1,2]. They are used for many purposes like in-air range-finding [3], finger-printing recognition [4], and sonography [5,6] in which the in-water propagation is involved.…”

Section: Introductionmentioning

confidence: 99%

Air-coupled PMUTs array with residual stresses: experimental tests in the linear and non-linear dynamic regime

Massimino

Lazarova

Quaglia

et al. 2020

International Journal of Smart and Nano Materials

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The mechanical characterization of a 4 × 4 air-coupled array of Piezoelectric Micromachined Ultrasonic Transducers (PMUTs) is presented. The experimental campaign consists of three set of experimental tests, namely: topography measurements, small signal dynamic measurements, and vibrometry in the non-linear dynamic regime. The behavior of three different kinds of PMUT are reported. They differ according to the thermo-electrical treatment that has been applied to the piezoelectric material. The presence of the fabrication induced residual stresses is investigated and the treatment effect is evaluated in terms of the initial deflected configuration. The results reported in this paper represent an experimental mechanical investigation useful for the design of PMUT structures with advanced functionalities in the linear and non-linear regime.

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Monolithic MEMS-CMOS ultrasonic rangefinder based on dual-electrode PMUTs

Cited by 29 publications

References 5 publications

High Fill Factor Array of Piezoelectric Micromachined Ultrasonic Transducers with Large Quality Factor

High Fill Factor Array of Piezoelectric Micromachined Ultrasonic Transducers with Large Quality Factor

On the Effects of Package on the PMUTs Performances—Multiphysics Model and Frequency Analyses

Air-coupled PMUTs array with residual stresses: experimental tests in the linear and non-linear dynamic regime

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