2008 IEEE International Electron Devices Meeting 2008
DOI: 10.1109/iedm.2008.4796635
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Monolithic integration of lateral field-effect rectifier with normally-off HEMT for GaN-on-Si switch-mode power supply converters

Abstract: A lateral field-effect rectifier (L-FER) that can be fabricated with normally-off transistor on the same AlGaN/GaN HEMT with the same fabrication process has been demonstrated. The L-FER exhibits low turn-on voltage, low specific on-resistance and high reverse breakdown. A prototype of switch-mode dc-dc Boost converter that features monolithically integrated L-FER and normally-off HEMT is demonstrated for the first time using industry-standard GaNon-Si epitaxial wafers to prove the feasibility of GaN power ine… Show more

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Cited by 44 publications
(21 citation statements)
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“…So far, there are several approaches to realize an enhancement mode operation, such as a recessed gate structure [1] [2], p-GaN gate [3][4] [5], p-AlGaN gate [6], fluoride-based plasma treatment [7], the piezoneutralization layer [8], and floating charges [9], etc. Among these different approaches, the AlGaN/GaN HEMT with either a p-GaN or p-AlGaN gate is a promising candidate for an enhancement mode device.…”
Section: Introductionmentioning
confidence: 99%
“…So far, there are several approaches to realize an enhancement mode operation, such as a recessed gate structure [1] [2], p-GaN gate [3][4] [5], p-AlGaN gate [6], fluoride-based plasma treatment [7], the piezoneutralization layer [8], and floating charges [9], etc. Among these different approaches, the AlGaN/GaN HEMT with either a p-GaN or p-AlGaN gate is a promising candidate for an enhancement mode device.…”
Section: Introductionmentioning
confidence: 99%
“…Thus, the normally-off HEMT, which is required in the power electronics application for its inherent fail-safe operation, can be realized. The robust control on the threshold voltage of the 2DEG channel is also recently utilized to realize a lateral field-effect rectifier (L-FER) that is fully compatible with normally-off HEMTs [3,4]. The schematic cross section of the proposed platform for GaN smart power technology is shown in Fig.…”
Section: A Power Devicesmentioning
confidence: 99%
“…It is thus desirable to develop smart power chip technology with which we can implement on-chip power conditioning and protection circuits that promise to provide optimized performance, increased functionality and enhanced reliability. Up to now, based on a fluorine plasma ion implantation technology [1, 2], we have developed the key smart power components including high-voltage normally-off transistors and lateral field-effect rectifiers [3,4]. We have also demonstrated the monolithic integration of enhancement-/depletion-mode AIGaN/GaN HEMTs for direct-coupled FET logic (DCFL) circuits that operate properly up to 375°C [5,6].…”
Section: Introductionmentioning
confidence: 99%
“…Today, the majority of GaN power electronic devices are fabricated with hetero-epitaxial GaN on non-native substrates such as Sapphire, Silicon Carbide (SiC) or Si substrates. Monolithic integration with MOS devices [1], GaN Monolithically integrated power converters [2,3] as well as GaN smart power ICs [4,5] have also been demonstrated on the GaN-on-Si platform paving the way forward to opportunities for system level simplification of numerous power electronic applications. An important aspect of the performance assessment of monolithically integrated circuits is the presence of crosstalk amongst the otherwise isolated devices and implications of the same.…”
Section: Introductionmentioning
confidence: 98%