2012
DOI: 10.1364/oe.20.009312
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Monolithic integration of a silica AWG and Ge photodiodes on Si photonic platform for one-chip WDM receiver

Abstract: On the silicon (Si) photonic platform, we monolithically integrated a silica-based arrayed-waveguide grating (AWG) and germanium (Ge) photodiodes (PDs) using low-temperature fabrication technology. We confirmed demultiplexing by the AWG, optical-electrical signal conversion by Ge PDs, and high-speed signal detection at all channels. In addition, we mounted a multichannel transimpedance amplifier/limiting amplifier (TIA/LA) circuit on the fabricated AWG-PD device using flip-chip bonding technology. The results … Show more

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Cited by 76 publications
(47 citation statements)
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“…For DWDM applications, lower index contrast than SiN waveguides may be required. This can be achieved by very-thin SiN waveguides as in [65], or silica waveguides as in [26]. In order to reduce the temperature sensitivity, one can use cladding materials with negative thermo-optic coefficients, which have been demonstrated for silicon waveguides [66]- [69].…”
Section: Remaining Challengesmentioning
confidence: 99%
“…For DWDM applications, lower index contrast than SiN waveguides may be required. This can be achieved by very-thin SiN waveguides as in [65], or silica waveguides as in [26]. In order to reduce the temperature sensitivity, one can use cladding materials with negative thermo-optic coefficients, which have been demonstrated for silicon waveguides [66]- [69].…”
Section: Remaining Challengesmentioning
confidence: 99%
“…Integration of photonic circuits on silicon provides a potential solution for low-cost, highly scalable and energy-efficient on-chip data communications. Wavelength-division multiplexing (WDM) is one of the most mature multiplexing technology used in telecommunications and has been widely explored for on-chip optical interconnects [3][4][5][6][7]. However, WDM has limitations in bandwidth density scalability and requires multiple precise wavelength sources, which are not currently available within the cost scenarios of a single-user computer.…”
Section: Introductionmentioning
confidence: 99%
“…For telecommunication applications, the integration of an AWG demultiplexer with a photodetector array allows realizing a WDM receiver [10]. For spectroscopic applications, it is the first step towards a fully integrated spectroscopic sensing system [11].…”
Section: Introductionmentioning
confidence: 99%