2012
DOI: 10.1088/0960-1317/22/5/055027
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Monolithic fabrication of millimeter-scale machines

Abstract: Silicon-based MEMS techniques dominate sub-millimeter scale manufacturing, while a myriad of conventional methods exist to produce larger machines measured in centimeters and beyond. So-called mesoscale devices, existing between these length scales, remain difficult to manufacture. We present a versatile fabrication process, loosely based on printed circuit board manufacturing techniques, for creating monolithic, topologically complex, three-dimensional machines in parallel at the millimeter to centimeter scal… Show more

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Cited by 159 publications
(138 citation statements)
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“…cost, weight, printability, and porosity), HEPAs could be useful in applications benefitting from monolithic integration in paper-based printed microfluidic [6][7][8][9][10] and electronic devices, [16][17][18][19][20][21][22] paper MEMS, [16,23,24] printable and foldable micro machines, [24][25][26] and robots. [25,27,40] Their speed of actuation, and the force they produce, however, is low (by standards of more conventional electromagnetic and pneumatic / hydrolic systems), but they are also lighter, much less expensive, and much more easily integrated with paper devices (diagnostic, bioanalytical, and electromechanical systems, for example) than are the more universal systems.…”
Section: Resultsmentioning
confidence: 99%
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“…cost, weight, printability, and porosity), HEPAs could be useful in applications benefitting from monolithic integration in paper-based printed microfluidic [6][7][8][9][10] and electronic devices, [16][17][18][19][20][21][22] paper MEMS, [16,23,24] printable and foldable micro machines, [24][25][26] and robots. [25,27,40] Their speed of actuation, and the force they produce, however, is low (by standards of more conventional electromagnetic and pneumatic / hydrolic systems), but they are also lighter, much less expensive, and much more easily integrated with paper devices (diagnostic, bioanalytical, and electromechanical systems, for example) than are the more universal systems.…”
Section: Resultsmentioning
confidence: 99%
“…[3][4][5] For example, we and others have used it for microfluidic [6][7][8][9][10] and electroanalytical devices as the basis for low-cost diagnostics, [11,12] as 3-D scaffolds for cell growth, [13][14][15] as a substrate for printed electronics, [16][17][18][19][20][21][22] and in micro-electromechanical systems (MEMS). [16,23,24] A missing component for paper-based devices is an electrically controlled actuator that is embedded within the paper, can be fabricated by printing, and continues to operate when the paper that supports it is creased and/or folded. Paper actuators that fulfill these requirements have the potential to allow control of liquid transport in paperbased microfluidic devices, to enable assembly of micro machines through self-folding, [24][25][26] and to serve as microactuators for paper devices.…”
Section: Introductionmentioning
confidence: 99%
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“…At small scales -for example, for aircraft of comparable size to insects and small birds -some of these techniques fail, typically owing to limited resolution. Alternative methods have been developed; for example, those based on folding (an inherently scalable technique) have been used to create insect-sized robots, avoiding the challenges that are inherent to macro-scale nuts-and-bolts approaches 20 .…”
Section: Actuation Power and Manufacturingmentioning
confidence: 99%
“…While several devices have been demonstrated to deliver high power at very small-scale (1-100 mg), the fabrication processes are either long duration, [7] or rely on unconventional materials, [8] or are difficult to replicate. [9] In addition, the most established processes to make lightweight batteries rely on thin-film, solid electrolyte chemistries, which suffer from rate limitations at room temperature, [10,11] To create lighter mesoscale power sources, we have developed a method to fabricate ultra-lightweight, high power lithium-ion batteries by applying a laser micro manufacturing process, [12,13] to commercially available materials. The laser micro machining leads to micron scale precision in cutting and alignment, as well as scalable parallel fabrication.…”
Section: Ultra-lightweight High Power Density Lithium-ion Batteriesmentioning
confidence: 99%