2023
DOI: 10.1038/s41467-023-41736-2
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Monolithic 3D integration of 2D transistors and vertical RRAMs in 1T–4R structure for high-density memory

Maosong Xie,
Yueyang Jia,
Chen Nie
et al.

Abstract: Emerging data-intensive computation has driven the advanced packaging and vertical stacking of integrated circuits, for minimized latency and energy consumption. Yet a monolithic three-dimensional (3D) integrated structure with interleaved logic and high-density memory layers has been difficult to achieve due to challenges in managing the thermal budget. Here we experimentally demonstrate a monolithic 3D integration of atomically-thin molybdenum disulfide (MoS2) transistors and 3D vertical resistive random-acc… Show more

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Cited by 6 publications
(3 citation statements)
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References 70 publications
(91 reference statements)
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“…Further optimizations have to be focused both at the device architectural level and at the material selection choices to minimise issues like the high ON current observed in RRAM devices. Device architectural innovations like multi-terminal device design [ 172 ], 3D stacking [ 173 ], interface & filament modulation [ 174 ], defect engineering [ 175 ], etc. have been effective in mitigating RRAM device-level non-idealities.…”
Section: Challenges and Future Outlookmentioning
confidence: 99%
“…Further optimizations have to be focused both at the device architectural level and at the material selection choices to minimise issues like the high ON current observed in RRAM devices. Device architectural innovations like multi-terminal device design [ 172 ], 3D stacking [ 173 ], interface & filament modulation [ 174 ], defect engineering [ 175 ], etc. have been effective in mitigating RRAM device-level non-idealities.…”
Section: Challenges and Future Outlookmentioning
confidence: 99%
“…As the fourth fundamental element, memristors have recently been utilized as artificial synapses and neurons in neuromorphic architectures due to their simplicity and power efficiency and have been found to be a promising candidate for artificial synapses and neurons [12,[22][23][24][25][26][27]. Additionally, more reports have proven that emerging two-dimensional (2D) layered materials are being actively and innovatively used in memristive devices to make a more intelligent electronic synapse [28][29][30][31][32][33]. Y. Gogotsi et al discovered that MXenes have catalyzed the development of a vast and rapidly growing array of 2D materials [34][35][36].…”
Section: Introductionmentioning
confidence: 99%
“…[1,[13][14][15] In particular, recent notable achievements in the monolithic 3D integration of 2D materials or advanced memory demonstrate significant potential for the advancement of diverse processor technology. [16,17] However, several challenges hinder the use of graphene in interconnect applications. First, the growth of highly crystalline graphene using chemical vapor deposition (CVD) technology necessitates a high-temperature process above 800 °C.…”
Section: Introductionmentioning
confidence: 99%