2010
DOI: 10.1007/978-3-642-11598-1_21
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Abstract: Abstract.The rationales for the use of microsystems are numerous, including the reduction of consumables, a faster response time, the enhanced portability, the higher resolution, and the higher efficiency; moreover their application sectors are numerous. Nevertheless microproducts have still great difficulty in penetrating the market, mainly due to the limits of the fabrication processes. The hybrid approach is suitable for the fabrication of three dimensional microscopic structures but often requires manual …

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