Monitoring of radio-frequency glow-discharge plasma

Mutsukura, Nobuki; Kono, Kenji; Machi, Yoshio

doi:10.1063/1.343826

Cited by 40 publications

(17 citation statements)

References 34 publications

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“…The length from the peak of the emission intensity to the nearest electrode is measured as the sheath width in some experimental work [89]. Attention will be focused on the fact that the sheath width determined by the emission peak differs in detail between the target lines.…”

Section: Results and Discussignmentioning

confidence: 99%

Modeling and diagnostics of the structure of rf glow discharges in Ar at 13.56 MHz

Makabe

Nakano

Yamaguchi³

1992

Phys. Rev. A

135

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The structure of rf glow discharges in Ar at 13.56 MHz is described, making use of a relaxation continuum model. The model includes consideration of the relaxation kinetics for the momentum and energy of charged particles. The discharge structure and plasma property are modeled using molecular quantities (i.e. , collision cross sections, radiative lifetimes, etc.) and macroscopic transport quantities for charged particles. Spatiotemporal distributions for the field and the net production rate and density of particles are studied in detail in the bulk plasma as well as the ion sheath under periodic steady-state conditions. In particular, the temporal profiles including phase shift and nonlinear variation with respect to the applied-voltage wave form are discussed. Each type of excited atom shows a different spatiotemporal density distribution due to different loss mechanisms, although the production profiles are similar. That is, Ar( ps) is controlled by a radiative decay and quenching in collisions with Ar( So), while Ar( Po & ) is controlled by diffusion. The validity of the relaxation continuum model is investigated by the observation of external electric properties and the measurement of spatiotemporally resolved optical emission from the rf glow. Quantitative comparison of the results from theory and experiment supports the validity of the relaxation continuum model. The relaxation continuum model is simple and physically reasonable.PACS number(s): 52.80. Hc, 52.25.Fi, 52.70.Kz

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Section: Results and Discussignmentioning

confidence: 99%

Modeling and diagnostics of the structure of rf glow discharges in Ar at 13.56 MHz

Makabe

Nakano

Yamaguchi³

1992

Phys. Rev. A

135

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“…This population of energetic electrons produced by the growing sheath is responsible for the formation of the excitation pattern (I), as one can see in the figures 7(a,b). Such an excitation pattern is well known from investigations of argon and hydrogen plasmas [2,5,6,[23][24][25][26][27][28], among others [4,8,29,30]. As the front of the high energy electrons moves towards the bulk together with the sheath edge, one can clearly identify the sheath edge position during the first quarter of the rf cycle by the lower margin of the excitation pattern (I).…”

Section: II Iii Ivmentioning

confidence: 94%

Excitation Mechanisms and Sheath Dynamics in Capacitively Coupled Radio‐Frequency Oxygen Plasmas

Dittmann

Matyash

Nemschokmichal

et al. 2010

Contrib. Plasma Phys.

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Phase resolved optical emission spectroscopy (PROES) was used to determine the spatio-temporal behavior of excitation rates in rf sheaths of capacitively coupled plasmas at 13.56 MHz. The plasmas were ignited in pure oxygen at pressures from 20 to 100 Pa and rf powers from 10 to 100 W. The spatial and phase resolved excitation rates have shown four characteristic patterns, which differing in their spatial and temporal position.PIC-MCC simulations of the oxygen capacitively coupled radio-frequency discharge were used to get a detailed microscopic description of the dynamic processes in rf plasmas. The PIC-MCC simulations reproduced the excitation patterns observed in experiment quite well and allowed to identify the underlying physics.Three excitation patterns appearing in front of the powered electrode were found to be due to electron impact dissociative excitation of molecular Oxygen, whereas the fourth pattern very close to the powered electrode is attributed to collisions of the positive ions with the background gas.

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“…However in rf-driven hydrogen and hydrogen-containing plasmas two bright optical emission regions associated with the driven electrode are commonly observed. [1][2][3][4][5][6] The emission from the two regions has been shown to occur at distinct times during the rf cycle. The outer, bulk, emission is also observed in other gases; it occurs near the expanding sheath edge 1 and is caused by electrons accelerated into the plasma.…”

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confidence: 97%

Sheath dynamics observed in a 13.56 MHz-driven plasma

Mahony

Wazzan²,

Graham

1997

Applied Physics Letters

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We have established, through time correlated plasma emission and electrode and plasma potential measurements, that the near electrode emission observed in asymmetric capacitively coupled 13.56 MHz-driven hydrogen plasmas is caused by field reversal that leads to sheath collapse. Near-electrode emission has now been observed in Ar and He. The field reversal appears to be due to collision-induced electron drag.

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Monitoring of radio-frequency glow-discharge plasma

Cited by 40 publications

References 34 publications

Modeling and diagnostics of the structure of rf glow discharges in Ar at 13.56 MHz

Modeling and diagnostics of the structure of rf glow discharges in Ar at 13.56 MHz

Excitation Mechanisms and Sheath Dynamics in Capacitively Coupled Radio‐Frequency Oxygen Plasmas

Sheath dynamics observed in a 13.56 MHz-driven plasma

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