Abstract:The use of pressure limiting apertures and differential pumping systems has allowed the realization of scanning electron microscopes that can tolerate specimen chamber pressures in the range 1-20 torr (0.13-2.7 kPa) while maintaining the electron gun and column at high vacuum (< 10-6 mbar, 0.13 mPa) [1]. The presence of a (water)-gas atmosphere in the specimen chamber allows for imaging of uncoated biomaterial at high beam energies. In principle the wet-mode technology of the ESEM enables the investigation of … Show more
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