Molybdenum-gold proximity bilayers as transition edge sensors for microcalorimeters and bolometers

Chen, T C; Finkbeiner, F. M.; Bier, A.; DiCamillo, B

doi:10.1088/0953-2048/12/11/344

Cited by 6 publications

(6 citation statements)

References 4 publications

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“…Thus, a detailed determination of α, that would require much more data points, was beyond the scope of the present study. From our RpT q measurements α can be roughly estimated as "400, which is an order of magnitude smaller than those usually reported in literature for lithographed samples of similar bilayers [33,34,35]. Within the obtained error bars, no change of α is observed in the measured temperature range, although results do not completely rule out small changes in α.…”

Section: Figurecontrasting

confidence: 60%

Thermal stability of Mo/Au bilayers for TES applications

Parra-Borderías¹,

Fernández-Martínez²,

Fàbrega³

et al. 2012

Supercond. Sci. Technol.

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Mo/Au bilayers are among the most suitable materials to be used as Transition-Edge Sensors (TES) in cryogenic microcalorimeters and bolometers, developed among other fields for space missions. For this purpose the thermal stability of TES at temperatures below 150˝C is a critical issue. We report on the dependence of functional properties (superconducting critical temperature, residual resistance and α) as well as on microstructure, chemical composition and interface quality for optimized high quality Mo/Au bilayers on annealing temperature and time. Data show that the functional properties of the bilayers remain stable at T ă 150˝C, but changes in microstructure, interface quality and functional properties were observed for layers heated at T ě 200˝C. Microstructural and chemical composition data suggest that the measured changes in RRR and T C at T ě 200˝C are mainly due to an increase in the average Au grain size and to Au migration along the Mo grain boundaries at the Au/Mo interface. A way to stabilize the functional properties of the Mo/Au bilayers against temperature enhancements is proposed.

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Section: Figurecontrasting

confidence: 60%

Thermal stability of Mo/Au bilayers for TES applications

Parra-Borderías¹,

Fernández-Martínez²,

Fàbrega³

et al. 2012

Supercond. Sci. Technol.

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“…While Ti/Au bilayers may suffer aging problems [8], Mo/Au bilayers display excellent chemical stability to stand the required conditions for detectors in spacecrafts [9]. However, deposition of Mo thin films with suitable and reproducible functional properties ( , resistivity) usually requires temperatures above 500 [10]- [17]. These high temperatures may affect the quality of the interface [10].…”

Section: Introductionmentioning

confidence: 99%

“…However, deposition of Mo thin films with suitable and reproducible functional properties ( , resistivity) usually requires temperatures above 500 [10]- [17]. These high temperatures may affect the quality of the interface [10]. Even more, they add difficulties to the prefabrication of heat sinking and electrical interconnection layers.…”

Section: Introductionmentioning

confidence: 99%

Mo-Based Proximity Bilayers for TES: Microstructure and Properties

Fàbrega

Fernández-Martínez

Gil

et al. 2009

IEEE Trans. Appl. Supercond.

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We report on the fabrication and characterization of Mo films, Mo/Au and Mo/Cu bilayers for Transition Edge Sensors (TES). The fabrication conditions (at room temperature) have been varied to achieve layers with the required properties for TES applications. The dependence of their functional properties (i.e. electrical resistivity and superconducting critical temperature) on microstructure (grain size, stress) is investigated.

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“…Since the Au thickness above £M does not influence the T c value, for d,A u > CM, we substitute d M = ÍM-Under this assumption [26], the value of the transparency of the interface determined by fitting the T c (d Mo ) data (not shown) to (3)-t ~ 0.3-is similar to those reported for TES with excellent performance [14], [17], [18], [27].…”

Section: A Functional Propertiesmentioning

confidence: 60%

“…This solution is selective to Au, thus Au layer can be used as a mask for Mo. Moreover, since Mo etching is about 20 times faster in the lateral than in the vertical, Au layer overhangs Mo and, when samples are taken out of the wet etch and let dry, these overhangs collapse covering in a simple way Mo edges [18], [19] as confirmed by the AFM image shown in Fig. 1.…”

Section: B Bilayer Definition Through Lithographymentioning

confidence: 70%

Characterization of a Mo/Au Thermometer for ATHENA

Parra-Borderías

Fernández-Martínez

Fàbrega

et al. 2013

IEEE Trans. Appl. Supercond.

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Abstract-The first dark characterization of a thermometer fabricated with our Mo/Au bilayers to be used as a transition edge sensor is presented. High-quality, stress-free Mo layers, whose thickness is used to tune the critical temperature (2c) down to 100 mK, are deposited by sputtering at room temperature (RT) on SÍ3N4 bulk and membranes, and protected from degradation with a 15-nm sputtered Au layer. An extra layer of high-quality Au is deposited by ex situ e-beam to ensure low residual resistance. The thermometer is patterned on a membrane using standard photolithographic techniques and wet etching processes, and is contacted through Mo paths, displaying a sharp superconducting transition (a « 600). Results show a good coupling between Mo and Au layers and excellent Tc reproducibility, allowing to accurately correlate <1MO an d Tc-Since d^u is bigger than |M for all analyzed samples, bilayer residual resistance can be modified without affecting Tc-Finally, first current to voltage measurements at different temperatures are measured and analyzed, obtaining the corresponding characterization parameters.

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Molybdenum-gold proximity bilayers as transition edge sensors for microcalorimeters and bolometers

Cited by 6 publications

References 4 publications

Thermal stability of Mo/Au bilayers for TES applications

Thermal stability of Mo/Au bilayers for TES applications

Mo-Based Proximity Bilayers for TES: Microstructure and Properties

Characterization of a Mo/Au Thermometer for ATHENA

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