Microstructural aspects of wear resistance have been investigated using cross-sectional transmission electron microscopy (TEM) to analyze both as-deposited and worn films. Asdeposited Pb-Mo-S films were virtually amorphous, i.e., show no long range structure. Wear tracks revealed a two-part wear process localized at the sliding surface. First, Pb-Mo-S at the sliding surface was transformed into basal-oriented, crystalline MoS 2 from 1 to 4 monolayers thick. Then, as sliding continued, the MoS 2 layers were detached one or two layers at a time. Evidence for the nanometer scale wear process is presented.