2009
DOI: 10.1002/cvde.200804266
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Molecular Layer Chemistry via Parylenes

Abstract: Communication: Parylene polymers have a main‐chain phenyl group, which possesses a high in‐plane electronic polarizability and allows for strong molecule‐to‐molecule interaction. This chemistry is far more robust than traditional self‐assembled monolayers since no special surface treatment is needed and these molecular layers are room temperature chemical vapor deposited. Parylene molecular layers are particularly useful for nanotechnology driven applications where manufacturability is important.

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Cited by 12 publications
(10 citation statements)
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References 15 publications
(17 reference statements)
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“…We also adapted our fabrication process to develop polymer coated microprobes made from parylene. Parylene has emerged as a promising material for fabricating neural probes due to its: (1) biocompatibility, (2) chemical inertness, and (3) conformal nature (pin-hole free deposition) [73].…”
Section: Introductionmentioning
confidence: 99%
“…We also adapted our fabrication process to develop polymer coated microprobes made from parylene. Parylene has emerged as a promising material for fabricating neural probes due to its: (1) biocompatibility, (2) chemical inertness, and (3) conformal nature (pin-hole free deposition) [73].…”
Section: Introductionmentioning
confidence: 99%
“…It has previously been shown that parylene deposition on transition metals is inhibited by chemical deactivation and desorption of the polymer, resulting in highly non-uniform deposition. [21,27] Here, we show that if the polymer islands are not yet large enough to form a continuous network, the transition metal can be chemically etched, lifting off the parylene as well. Hence, by utilizing a sacrificial layer of iron on areas of the tube we wish to leave exposed, we are able to lift off incomplete parylene networks, re-exposing the underlying nanotube.…”
Section: Introductionmentioning
confidence: 81%
“…A standard target plate was covered with a layer of poly( p ‐xylylenes) (PPX) using a vacuum coating technique (Parylene technology) according to the classical Gorham process, deposited at room temperature (295 K).…”
Section: Methodsmentioning
confidence: 99%