Molecular Dynamics Study of Stress Relaxation During Ge Deposition on Si(100) $2\times 1$ Substrates

Martín-Encinar, Luis; Marqués, Luis A.; Aboy, María; López, Pedro; Santos, Iván; Pelaz, Lourdes

doi:10.1109/cde58627.2023.10339527

2023 14th Spanish Conference on Electron Devices (CDE) 2023

DOI: 10.1109/cde58627.2023.10339527

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Molecular Dynamics Study of Stress Relaxation During Ge Deposition on Si(100) $2\times 1$ Substrates

Luis Martín-Encinar,

Luis A. Marqués,

María Aboy

et al.

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Molecular Dynamics Study of Stress Relaxation During Ge Deposition on Si(100) $2\times 1$ Substrates

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References 17 publications

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