2019
DOI: 10.1007/s11705-019-1792-5
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Molecular dynamics simulations of initial Pd and PdO nanocluster growth in a magnetron gas aggregation source

Abstract: Molecular dynamics simulations are carried out for describing growth of Pd and PdO nanoclusters using the ReaxFF force field. The resulting nanocluster structures are successfully compared to those of nanoclusters experimentally grown in a gas aggregation source. The PdO structure is quasi-crystalline as revealed by HRTEM analysis for experimental PdO nanoclusters. The role of the nanocluster temperature in the MD simulated growth is highlighted.

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Cited by 11 publications
(14 citation statements)
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“…Furthermore, the two‐body mechanism or atom attachment can also contribute to the cluster growth and to the final size. The formation of a Pd‐O bond releases more energy than a Pd‐Pd bond therefore, the formation of PdO clusters takes longer to reach a thermal equilibrium, slowing the clustering process that can explain the size decrease at high OFR . The relative size dispersion increases when increasing the OFR from 0 to 1 sccm as also observed in Figure c and is much higher at the OFR value of 5 sccm.…”
Section: Resultsmentioning
confidence: 55%
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“…Furthermore, the two‐body mechanism or atom attachment can also contribute to the cluster growth and to the final size. The formation of a Pd‐O bond releases more energy than a Pd‐Pd bond therefore, the formation of PdO clusters takes longer to reach a thermal equilibrium, slowing the clustering process that can explain the size decrease at high OFR . The relative size dispersion increases when increasing the OFR from 0 to 1 sccm as also observed in Figure c and is much higher at the OFR value of 5 sccm.…”
Section: Resultsmentioning
confidence: 55%
“…Moreover, the local gas heating could modify the aggregation zone and contribute to the size distribution broadening. A recent work describing the cluster growth process by molecular dynamic (MD) simulations confirms that an increase of the temperature is observed during the first steps of formation of the Pd clusters. MD simulations also showed the same behavior during the initial steps of the formation of PdO clusters but a longer period of time was needed to reach the thermal equilibrium due to the formation of Pd‐O bonds.…”
Section: Resultsmentioning
confidence: 82%
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“…A neutral gas buffer is added for describing the energy dissipation during collisions. This is mimicking free nanoparticle growth in the context of a gas aggregation source (GAS) where atoms are sputtered in such a gas at a pressure high enough for allowing clustering in the flight [29][30][31][32][33].…”
Section: Methodsmentioning
confidence: 99%