(CsI) n Cs + projectiles, n = 0-3, were used to bombard a NaBF 4 (sodium tetrafluoroborate) target at the limit of single ion impacts. The relative yields of ions sputtered from the target were measured and are compared as a function of the number of atoms in the primary ion. When normalized to the mass of the primary ion, sputtered ions that do not resemble the original sample composition, (NaF) n F -, increase in yield as the primary ion complexity increases. The yields of atomic species and polyatomic ions emitted presumably as intact units decrease as the projectile complexity increases. © 1997 John Wiley & Sons, Ltd. Received 2 May 1997; Revised 13 August 1997; Accepted 15 August 1997 Rapid. Commun. Mass Spectrom. 11, 1794-1798(1997 In secondary ion mass spectrometry (SIMS), it is well established that enhanced secondary ion (SI) yields are gained using polyatomic primary projectiles.1-9 The enhanced yields are produced when the amount of energy deposited in the surface region of a solid is high. At keV bombarding energy, where nuclear stopping predominates, polyatomic projectiles will penetrate a surface, fragment and deposit energy by recoil cascades in a spatially confined region. The overlap of recoil cascades leads to the formation of a collision or energy spike.10-12 Recent work has suggested that the energy density, the amount of energy deposited into the solid per unit volume, near the surface, as opposed to the energy loss (dE/dx) is the important parameter for the enhanced yield.13 At constant bombarding energy, the energy density deposited can be scaled upward by increasing the number of atoms in the projectile; viz. higher energy density is achieved using projectiles with many atoms. 14 The object of this study was the relationship between the features of a mass spectrum (SI composition and yield) and the number of atoms contained in the primary projectile. There are two general negative ion formation pathways for SI sputtered from sodium tetrafluoroborate, NaBF 4 , observed first in ion formation studies using plasma desorption mass spectrometry. 15 One pathway is the emission of intact BF 4 -alone and its incorporation into larger cluster species; the other is the formation of ions following the series (NaF) n F -. The latter series is assumed to be formed by recombination/rearrangement reactions in the ion formation process. 16 For this reason, NaBF 4 was chosen as a model target for this study. Our goal was to determine whether the yields of different types of SI are sensitive to the energy density deposited into the surface region. The study was performed by monitoring the SI yields induced by the impacts of Cs + and (CsI) n Cs + (n = 1-3) projectiles at constant bombarding energy. The experiment was conducted in the event-by-event bombardment and detection mode at the limit of single ion impacts using coincidence counting techniques.
EXPERIMENTALA dual time-of-flight (TOF) mass spectrometer was used to measure simultaneously the electrons and ions emitted from a target during energetic io...