Moiré effect-based Overlay target design for OPO improvements

Heuvel, Dieter Van den; Leray, Philippe; Hajaj, Eitan; Shaphirov, Diana; Ashwal, Eltsafon; Dror, Chen; Yohanan, Raviv; Ghinovker, Mark; Gordon, K. S.; Liu, Zephyr; Gronheid, Roel; Spielberg, Hedvi

doi:10.1117/12.2585876

Cited by 4 publications

(3 citation statements)

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“…Spielberg does not just start his films, whereby he prefers to use a production design like a prop or piece on the set that serves to put the audience in the context of the film instead of just throwing them into it. In all his best films, he starts the film itself by presenting the audience with production design elements so that they can appreciate the visual elements of the setting before they can dive into the narrative [4]. By so doing, the audience receives a visual reset so that they can know that a new set is starting, which makes his films episodic and easy to follow for the audience.…”

Section: Discussionmentioning

confidence: 99%

Spielberg’s Filmmaking Style and Techniques

Ding¹

2023

Proceedings of the 2022 4th International Conference on Literature, Art and Human Development (ICLAHD 2022)

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Spielberg has managed the nearly unachievable position of one of the most successful directors by ensuring that his films are iconic, which means that any person will see that every possible element of his film is usually very well thought out and implemented excellently. Even the production designs in his films have a unique role, whereby he uses a prop or set piece in not only introducing scenes, but also in contextualizing them to the audience accordingly. These elements make his work unique, as indicated in how many of his films are iconic and have made him one of the most renowned, successful and influential directors in the world. The director also uses performance blocking to move actors in the scene so that his film has kinetic energy, and communicates sub-textually to the audience. Multiple compositions in shots are also used generously in Spielberg films as a means of introducing elements like emotion, attracting attention, and keeping the overall film entertaining enough. By applying these elements Spielberg manages to keep his audience engaged so that they do not miss the point he is attempting to make in the narrative of his various films. Camera movement is another element in which Spielberg takes a unique approach, whereby he understands the importance of moving the camera in all directions at all speeds at the same time as a means of enhancing the cinematic value of the film. While new and upcoming directors need not copy Spielberg's style because he has established himself as the expert in this respect, they could greatly benefit from studying his approach to filmmaking.

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Section: Discussionmentioning

confidence: 99%

Spielberg’s Filmmaking Style and Techniques

Ding¹

2023

Proceedings of the 2022 4th International Conference on Literature, Art and Human Development (ICLAHD 2022)

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“…OVL accuracy improvement is an endless quest to support OPO reduction which is heading to sub 2nm OPO. Imagingbased OVL (IBO) has made significant accuracy improvements in the last years with the introduction of new metrology tool capabilities coupled with new OVL targets such as robust AIM (rAIM ® ) and color per layer AIM (CPL AIM) [3]- [8]. Both of these OVL targets are optimized in the initial technology development phase and implemented in high-volume manufacturing (HVM).…”

Section: Introductionmentioning

confidence: 99%

Small pitch overlay imaging metrology targets for tight OPO control

Roy,

Housley,

Manampurathu

et al. 2024

Metrology, Inspection, and Process Control XXXVIII

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Sub-2nm On Product Overlay (OPO), scribe line width reduction, and high-order scanner correctibles are driving innovative overlay (OVL) targets. One promising new imaging-based overlay (IBO) OVL target to address such challenging trends in multiple semiconductor segments is a small pitch AIM ® (sAIM™). sAIM is in essence an IBO target with grating (previous layer) beside grating (current layer) which could be placed in a few layouts: square, rectangular, and Mosaic. In this work, we will present the sAIM operational concept and performance including Total Measurement Uncertainty (TMU), residuals, and accuracy (ADI on-target offset vs. ACI on-device or target), which is often referred to as Non-Zero Offset (NZO).

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“…These periodic patterns with enhanced information content are robust to process variation and could be optimized per process layer [3]- [4]. rAIM targets, shown in Figure 1, utilize a smaller pitch compared to AIM targets which typically leads to a more device-like pattern and improves the process compatibility and robustness, lowers the residual, and has better accuracy [5]- [8]. Small pitch AIM (sAIM ™ ) is another IBO OVL target to support metrology measurements.…”

Section: Introductionmentioning

confidence: 99%

NZO reduction via small pitch imaging-based overlay targets

Cheng,

Hong,

Huang

et al. 2024

Metrology, Inspection, and Process Control XXXVIII

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On-product overlay (OPO) control in the DRAM process has become a critical component from node to node to produce high device yield. To meet OPO node goals, Non-Zero Offset (NZO) and its stability across lots must be monitored and controlled. NZO is the bias between overlay (OVL) on-target measurement at After Development Inspection (ADI) vs. ondevice measurement at After Etching Inspection (AEI). In this paper, we will present Imaging-Based Overlay (IBO) metrology data at ADI of two different marks, segmented AIM ® with design rule patterns and robust AIM (rAIM ® ) with Moiré effect with a small pitch. NZO analysis will be presented for each target type including basic performance.

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Moiré effect-based Overlay target design for OPO improvements

Cited by 4 publications

References 0 publications

Spielberg’s Filmmaking Style and Techniques

Spielberg’s Filmmaking Style and Techniques

Small pitch overlay imaging metrology targets for tight OPO control

NZO reduction via small pitch imaging-based overlay targets

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