2017
DOI: 10.1016/j.surfcoat.2016.10.040
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Modulation period of Ag deposition on co-sputtered TiN-Ag leading to different microstructures: Implication on mechanical properties and living cells growth

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Cited by 8 publications
(4 citation statements)
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“…CuSbSe 2 thin films were deposited on 1 × 1 cm 2 Corning glass substrates using an RF magnetron cosputtering system (IDT Engineering Co., Gyeonggi, Korea) [24][25][26][27], as shown in Figure S1, with CuSe 2 (TASCO, Seoul, Korea, 99.99% purity, 2-inch diameter) target under a fixed power of 40 W and variable power for Sb (TASCO, 99.99% purity, 2-inch diameter) target from 13 to 21 W in increments of 2 W, while other parameters were kept constant using the following conditions: presputtering process for 5 min prior to each run, an Ar gas flux of 20 sccm, base pressure of 1.0 × 10 −6 Torr, substrate-to-target distance of 5.0 cm, and vacuum pressure of 7.5 × 10 −3 Torr during sputtering at room temperature. During the target cleaning procedure, the substrates were shielded with a shutter.…”
Section: Methodsmentioning
confidence: 99%
“…CuSbSe 2 thin films were deposited on 1 × 1 cm 2 Corning glass substrates using an RF magnetron cosputtering system (IDT Engineering Co., Gyeonggi, Korea) [24][25][26][27], as shown in Figure S1, with CuSe 2 (TASCO, Seoul, Korea, 99.99% purity, 2-inch diameter) target under a fixed power of 40 W and variable power for Sb (TASCO, 99.99% purity, 2-inch diameter) target from 13 to 21 W in increments of 2 W, while other parameters were kept constant using the following conditions: presputtering process for 5 min prior to each run, an Ar gas flux of 20 sccm, base pressure of 1.0 × 10 −6 Torr, substrate-to-target distance of 5.0 cm, and vacuum pressure of 7.5 × 10 −3 Torr during sputtering at room temperature. During the target cleaning procedure, the substrates were shielded with a shutter.…”
Section: Methodsmentioning
confidence: 99%
“…Also, the biological toxicity of silver ions is dose dependent, the design strategy to control their cellular and tissue toxicity may be to enable the silver-containing coating on the implant surface to provide controllable release of silver ions (Xie et al, 2019). In our previous study, we showed that nanoscale TiN/Ag multilayers with a smaller modulation period had excellent mechanical properties and cellular compatibility (Sun et al, 2016a). In this study, we constructed silver-rich nano-multilayers that contained silver and titanium nitride on the surface of titanium alloys, and realized con- the implant, and bacterial infections can lead to insufficient boneimplant bonding (Kamath et al, 2015).…”
Section: Discussionmentioning
confidence: 99%
“…Biomedical titanium alloy (Ti‐6Al‐4 V) plates with a diameter of 10 mm were carefully polished and ultrasonically cleaned several times in ethanol and deionized water. A detailed description of the multilayer deposition and ion implantation has been presented in our previous study (Sun et al, 2016b; Sun et al, 2017). TiN/Ag multilayers were prepared using a multiarc ion‐plating system (SA‐6 T, China) and different doses of Ag ions were implanted on the surface of the TiN/Ag multilayers using an ion implantation system (MEVVA80III‐100, China).…”
Section: Methodsmentioning
confidence: 99%
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