Modular model-based supervisory controller design for wafer logistics in lithography machines

Sanden, Bram van der; Reniers, Michel A.; Geilen, Marc; Basten, Twan; Jacobs, Johan; Voeten, J.P.M.; Schiffelers, R.R.H.

doi:10.1109/models.2015.7338273

Cited by 22 publications

(20 citation statements)

References 32 publications

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“…An infinite product stream is simulated by using five ball instances (see Fig. 9), induced by the resource capacity of the system (see also [1]). Products enter the system in the order induced by their indices.…”

Section: Allowed Activity Sequencesmentioning

confidence: 99%

“…There is a formal specification model of the product logistics [1], that can be linked to the system model. However, synthesis of the Activity-FSM is not feasible due to scalability issues.…”

Section: Industrial Applicationmentioning

confidence: 99%

“…Functional requirements related to activity sequences are modularly and concisely specified using automata. These requirements can for instance enforce product life cycles and ensure safety [1]. The composition of these automata is characterized using multiparty synchronization, where execution of shared events among different automata is synchronous.…”

Section: Introductionmentioning

confidence: 99%

“…Our approach is already in use within ASML 1 , the world-leading manufacturer of lithography systems, to formalize the specification of the product handling part of their machines. The DSL that is put on top describes the system in terms of resources, actions, symbolic positions of motors, and activities that can be performed.…”

Section: Introductionmentioning

confidence: 99%

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Compositional specification of functionality and timing of manufacturing systems

Sanden

Bastos

Voeten

et al. 2016

2016 Forum on Specification and Design Languages (FDL)

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van der Sanden, L.J.; Nogueira Bastos, J.P.; Voeten, J.P.M.; Geilen, M.C.W.; Reniers, M.A.; Basten, T.; Jacobs, J.; Schiffelers, R.R.H. Published in:Proceedings of the 2016 Forum on specification and Design Languages, FDL 2016, Bremen, Germany, September 14-16, 2016 Published: 01/09/2016 Document VersionPublisher's PDF, also known as Version of Record (includes final page, issue and volume numbers)Please check the document version of this publication:• A submitted manuscript is the author's version of the article upon submission and before peer-review. There can be important differences between the submitted version and the official published version of record. People interested in the research are advised to contact the author for the final version of the publication, or visit the DOI to the publisher's website.• The final author version and the galley proof are versions of the publication after peer review.• The final published version features the final layout of the paper including the volume, issue and page numbers. Link to publication Citation for published version (APA):van der Sanden, L. J., Nogueira Bastos, J. P., Voeten, J. P. M., Geilen, M. C. W., Reniers, M. A., Basten, T., ... Schiffelers, R. R. H. (2016). Compositional specification of functionality and timing of manufacturing systems. In Proceedings of the 2016 Forum on specification and Design Languages, FDL 2016, Bremen, Germany, September 14-16, 2016 General rights Copyright and moral rights for the publications made accessible in the public portal are retained by the authors and/or other copyright owners and it is a condition of accessing publications that users recognise and abide by the legal requirements associated with these rights.• Users may download and print one copy of any publication from the public portal for the purpose of private study or research.• You may not further distribute the material or use it for any profit-making activity or commercial gain • You may freely distribute the URL identifying the publication in the public portal ? Take down policyIf you believe that this document breaches copyright please contact us providing details, and we will remove access to the work immediately and investigate your claim. Abstract-This paper introduces a formal modeling approach for compositional specification of both functionality and timing of manufacturing systems. Functionality aspects can be considered orthogonally to timing aspects. The functional aspects are specified using two abstraction levels; high-level activities and lower level actions. Design of a functionally correct controller is possible by looking only at the activity level, abstracting from the different execution orders of actions and their timing. As a result, controller design can be performed on a much smaller state space compared to an explicit model where timing and actions are present. The performance of the controller can be analyzed and optimized by taking into account the timing characteristics. Since formal semantics are given in terms of a (max, +) sta...

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Section: Allowed Activity Sequencesmentioning

confidence: 99%

Section: Industrial Applicationmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Compositional specification of functionality and timing of manufacturing systems

Sanden

Bastos

Voeten

et al. 2016

2016 Forum on Specification and Design Languages (FDL)

Self Cite

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“…These automata may share certain events, and it is assumed that shared events will only occur at the system level if all automata that share that event execute it simultaneously. It is this form of multiparty synchronisation that allows a compact and modular specification [11,42]. More recently, in order to increase modelling comfort, finite state machines were replaced by extended finite automata, which allow the use of variables in the automata [41].…”

Section: Supervisory Control Synthesismentioning

confidence: 99%

Supervisory Controller Synthesis for Product Lines Using CIF 3

Beek

Reniers

Vink

2016

Lecture Notes in Computer Science

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Abstract. Using the CIF 3 toolset, we illustrate the general idea of controller synthesis for product line engineering for a prototypical example of a family of coffee machines. The challenge is to integrate a number of given components into a family of products such that the resulting behaviour is guaranteed to respect an attributed feature model as well as additional behavioural requirements. The proposed correctness-byconstruction approach incrementally restricts the composed behaviour by subsequently incorporating feature constraints, attribute constraints and temporal constraints. The procedure as presented focusses on synthesis, but leaves ample opportunity to handle e.g. uncontrollable behaviour, dynamic reconfiguration, and product-and family-based analysis.

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Modeling Guidelines for Component-Based Supervisory Control Synthesis

Goorden

Mortel-Fronczak

Reniers

et al. 2020

Formal Aspects of Component Software

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and it is a condition of accessing publications that users recognise and abide by the legal requirements associated with these rights.• Users may download and print one copy of any publication from the public portal for the purpose of private study or research. • You may not further distribute the material or use it for any profit-making activity or commercial gain • You may freely distribute the URL identifying the publication in the public portal ? Take down policyIf you believe that this document breaches copyright please contact us providing details, and we will remove access to the work immediately and investigate your claim.

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Modular model-based supervisory controller design for wafer logistics in lithography machines

Cited by 22 publications

References 32 publications

Compositional specification of functionality and timing of manufacturing systems

Compositional specification of functionality and timing of manufacturing systems

Supervisory Controller Synthesis for Product Lines Using CIF 3

Modeling Guidelines for Component-Based Supervisory Control Synthesis

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