Modular integration of microactuators and micro-optical benches

Abstract

Micro-optical interferometer systems are requested for optical sensor application as well as for signal monitoring or signal (de)modulation in case of optical data networking. Using the opportunities of LIGA technology [1] with its precision in manufacturing of polymeric microstructures with a high aspect ratio, e.g. for the exact alignment of commercially available optical elements or to realize the micro optical structures itself, offers the possibility to design and fabricate complex modular micro-optical systems. Due to this modular concept the MOEMS are usually composed of a micro-optical bench (MOB) and an external platform with a micro actuator. The combination to a subsystem can be realized by standard assembly technology. A first designed prototype using this advanced modular concept is a micro Mach-Zehnder interferometer based on free space propagation. It was developed to be applied in different fields of c-band applications at 1550 nm up to 40 Gbps.

Free-space optical delay interferometer with tunable delay and phase

“…The signals are coupled with fiber grin lenses into and out of the DI. The dimensions of 85 × 45 × 25 mm 3 can be further decreased by using the LIGA technology as in [18]. The actuator used in this setup has a mechanical step size of about 2 nm, which corresponds to a phase offset of about 1°.…”