Modifying single-crystal silicon and trimming silicon microring devices by femtosecond laser irradiation
Jia Du,
Libing Zhou,
Weixiao Xu
et al.
Abstract:Single-crystal silicon (c-Si) is a vital component of photonic devices and has obvious advantages. Moreover, femtosecond-pulsed laser interactions with matter have been widely applied in micro/nanoscale processing. In this paper, we report the modification mechanisms of c-Si induced by a femtosecond laser (350 fs, 520 nm) at different pulse fluences, along with the mechanism of this technique to trim the phase error of c-Si-based devices. In this study, several distinct types of final micro/nanostructures, suc… Show more
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