Abstract:A key stage in production of the integrated optics devices is forming of microtopography on crystalline films. The current methods generally comprise two separate steps: producing of thin film and creation a topographical pattern on it. But the inherently large chemical stability of crystalline LiNbO 3 has effectively precluded the use of standard photolithographic patterning techniques. We present new approach based on the modified sol-gel technology using the photosensitive gel. In this case, the photolithog… Show more
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