Modified Fluid Simulation of an Inductively Coupled Plasma Discharge

Abstract

Recent developments in semiconductor technology have resulted in advancements in device manufacturing processes, especially when plasma discharges are required. In this investigation, an inductively coupled plasma (ICP) discharge with a radio frequency bias simulation was explored. A 2D symmetric structure is presented and a modified fluid model is applied using the electron distribution function (EEDF). This is achieved by using a two-term Boltzmann approximation and an ion energy distribution function (IEDF) with the particle-in-cell method. In addition, the heat transfer and gas flow effects are considered to improve the simulation results. The application of multi-physics components to the ICP discharge displays hybrid-like results using COMSOL[1].

Power characteristics of multiple inductively coupled RF discharges inside a metallic chamber

“…At a moderate pressure of 13 Pa, the transition occurred at about 200 W for molecular gases. Interestingly enough, theoretical predictions forecast the highest electron density in the middle of the plasma reactor, instead of at the spiral's proximity [24].…”

Dual-Frequency Microwave Plasma Source Based on Microwave Coaxial Transmission Line

“…In this investigation, the argon plasma considered in the simulated model contains only electrons (e), positively charged argon ions ( Ar + ), metastable-state argon (Ars), and argon (Ar) atoms. For these species, the main transportation equations are provided in Table 1 [20]. Stepwise ionization (Reaction 5 in Table 1) plays an important role in sustaining lowpressure argon discharges.…”

White light and colour-tunable emission from a single component europium-1,8-naphthalimide thin film

“…Their propensity towards advanced applications (ratiometric sensors, [1][2][3] molecular barcodes, 4 logic gates, 5 imaging agents, 6 and white emitting materials) [7][8][9][10][11] means they are high value targets. Various approaches to generating multi-emissive materials exist, [12][13][14][15] including the formation of supramolecular materials from trivalent lanthanide ions (Ln 3+ ). 7,11,16 Advantages of the supramolecular approach include combining both Ln 3+ and ligand functionalities easily into a single component (i.e.…”